Field electron emission cathode array based on metal molybdenum substrate and its preparation method
A field electron emission, molybdenum substrate technology, applied in cold cathode manufacturing, electrode system manufacturing, discharge tube/lamp manufacturing, etc., can solve the problem of low emission current density, achieve good shape consistency, field emission current density The effect of increasing, increasing the number
Active Publication Date: 2018-01-09
PEKING UNIV
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Problems solved by technology
[0007] In view of the problems existing in the prior art, the purpose of the present invention is to provide a field electron emission cathode array based on metal molybdenum substrate technology, and to manufacture a field electron emission cathode array with uniform appearance by using advanced micro-nano processing technology. It has significantly improved the problem of low emission current density of traditional metal cathodes
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[0027] The present invention will be described in further detail below through specific embodiments and accompanying drawings.
[0028] Such as figure 1 As shown, the field electron emission cathode array based on the metal molybdenum substrate process in this embodiment is formed by equidistant and dense distribution of single pointed cones with very high shape consistency. The distance between the tips of adjacent molybdenum cones is usually 1-100 microns, the height of a single molybdenum cone is usually 1-20 microns, and the radius of the bottom surface is usually 0.5-10 microns. In this embodiment, the distance between the tips of adjacent cones is 10 microns, the height of a single cone is 6 microns, and the radius of the bottom surface is 2.5 microns.
[0029] figure 2 It is the process flow chart of the field electron emission cathode array based on the metal molybdenum substrate process of this embodiment, the field electron emission cathode array is manufactured b...
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Abstract
The invention relates to a based on metal molybdenum of the substrate, field emission electron-emitting cathode array and a manufacturing method thereof. The field-induced electron-emitted cathode array comprises a plurality of metal molybdenum pointed cones consistent in morphology and regularly arranged. The metal molybdenum is subjected to plane manufacturing technology during the metal molybdenum substrate machining process, so that the array of pointed cones is high in morphology consistence. Through adjusting the machining parameters of the metal molybdenum substrate machining process, the morphology of the pointed cones can be conveniently changed. In this way, according to requirements of field emission currents, corresponding pointed cone arrays can be manufactured and machined for large-scale production. According to the technical scheme of the invention, through the metal molybdenum substrate machining process, pointed cone arrays are high in morphology consistence, and the number of simultaneously transmitted pointed cones is increased during operation. The density of the field emission current is further increased. Therefore, a large-area pointed cone array, which is good in shape consistency, can be obtained.
Description
technical field [0001] The invention belongs to the technical field of vacuum microelectronics, and in particular relates to a field electron emission cathode array based on a metal molybdenum substrate and a preparation method thereof. Background technique [0002] With the rapid development of electric vacuum technology, micro-nano processing technology, micro-electromechanical system MEMS technology and surface packaging technology, various disciplines are integrated internationally, and vacuum microelectronics is gradually formed. The field electron emission cathode array can be applied in the fields of microwave, sensor, ion source and display light source, etc., and has very important scientific significance and application value. [0003] The field electron emission cathode adsorbs and ionizes the gas atoms that have been adsorbed on the surface of the emitter through a strong electric field, and then obtains an ion current with a ratio of approximately 100% monatomic...
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IPC IPC(8): H01J1/304H01J9/02
Inventor 陈兢朱宁莉宋璐陈献
Owner PEKING UNIV