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Preparation method of BMN ceramic target

A ceramic target and powder technology is applied in the field of preparation of BMN ceramic targets, which can solve the problems of poor performance of BMN ceramic targets, and achieve the effects of excellent performance, excellent dielectric properties and compact structure

Inactive Publication Date: 2015-09-30
YANCHENG INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] One of the purposes of the present invention is to overcome the problem of poor performance of BMN ceramic targets obtained in the prior art, and to provide a method for preparing BMN ceramic targets. By applying this method, BMN ceramic targets with uniform and dense structure can be obtained.

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  • Preparation method of BMN ceramic target
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  • Preparation method of BMN ceramic target

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1B

[0037] Preparation of Example 1 BMN Ceramic Target

[0038] 1. Raw materials

[0039] The raw material is bismuth trioxide with a purity of 99.0wt% purchased from Wenzhou Chemical Materials Factory, magnesium oxide with a purity of 97.0wt% purchased from Shanghai Zhenxin Reagent Factory, and niobium pentoxide with a purity of 99.5wt% purchased from Sinopharm Chemicals Reagent Co., also includes distilled water and absolute ethanol.

[0040] 2. Preparation of BMN ceramic target

[0041] Step 1: Preparation of BMN powder

[0042] According to the chemical formula Bi 1.5 Mg 1.0 Nb 1.5 o 7 , for the preprocessed Bi 2 o 3 , MgO, Nb 2 o 5 and other raw materials for mass calculation. Consider Bi during sintering 2 o 3 Volatilization, Bi excess 10wt% weighed. After batching, put the weighed raw materials into a ball mill tank for mixing, use absolute ethanol as a dispersant, and perform ball milling with a mass ratio of balls, material, and ethanol at 1:2:1, and the bal...

Embodiment 2

[0050] The characterization of embodiment 2BMN ceramic target

[0051] (1) Phase structure analysis

[0052] X-ray diffraction (XRD) is an important means of material phase identification. Through XRD, the pre-sintered synthesis product can be analyzed, and the phase structure of the sintered target can be identified. In this experiment, an X-ray diffractometer (ARL X'TRA, Thermo Electron Co., Switzerland) was used for phase identification of BMN ceramic targets. The X-ray source adopts Cu target Kа line, the wavelength λ=0.15406nm, the main working parameters of the instrument are: the accelerating voltage is 40kV, the working current is 35mA, the scanning speed is 5 / m, and the scanning angle range is 10°~60°.

[0053] (2) Shape analysis

[0054] The ceramic samples were cut off and polished, and then etched for 30 minutes under the condition of 100 °C lower than the sintering temperature, and then gold-plated with a JFC-1600 ion sputtering device, and the secondary electr...

Embodiment 3

[0070] Example 3 BMN ceramic target pre-firing optimization

[0071] The pre-firing temperature is a crucial step in the preparation of ceramic samples. The main crystal phase of the desired product is generated through pre-firing, which is beneficial to the molding and sintering of ceramic samples. The mixed raw materials were calcined at 750°C, 800°C, 850°C and 900°C, and kept for 2 hours to synthesize BMN calcined powder.

[0072] figure 1 It is the XRD pattern of pre-calcined powder at different temperatures. Pre-burned Nb at 750°C 2 o 5 diffraction peaks. In the BMN powder pre-calcined at 800 °C, the diffraction peaks of the raw materials are all eliminated, but there is an intermediate product BiNdO 4 . After the pre-calcination temperature increased to 850℃, the intermediate products disappeared, and the synthesized BMN powder showed a single cubic pyrochlore structure. As the calcining temperature continued to increase, the XRD diffraction peaks of the BMN calci...

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Abstract

The invention discloses a preparation method of a BMN ceramic target, and belongs to the field of preparation of ceramic target. The preparation method comprises the following steps: step I, preparing BMN powder; step II, preparing green bodies; step III, sintering ceramic target to obtain needed ceramic target. The BMN ceramic target prepared by adopting the preparation method provided by the invention has the advantages of compact structure and excellent property, the prepared BMN ceramic target is compact in structure, less in air holes, regular in crystalline grains and 2-5 mum in sizes, the chemical formula of the component of ceramic target is Bi1.48MgNb1.5O6.97, the maximum value of the relative density is 97.03 wt%, the dielectric property is excellent, the dielectric constant below 1 MHz is 170.4, and the dielectric loss is 6.25*10-4.

Description

technical field [0001] The invention belongs to the field of preparation of ceramic targets, and in particular relates to a preparation method of BMN ceramic targets. Background technique [0002] The target is the sputtering source of the magnetron sputtering coating. The quality of the target plays a vital role in the performance of the film. Therefore, high-quality targets are the premise and basis for ensuring the quality of the film. A large number of studies have shown that the influence of the target The main factors of target material quality are: purity, density, structural orientation, grain size and distribution, size, shape, etc. Among them, the most important indicators to measure the quality of the target material are the relative density, purity, crystal orientation and microstructure of the target material. uniformity. [0003] The sputtering process has high requirements on the density of the target material. If the target material structure is poor in dens...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/495C04B35/622
Inventor 高虹
Owner YANCHENG INST OF TECH