Superlattice electrolyte preparation technology
A preparation process and superlattice technology are applied in the field of preparation technology of solid oxide fuel cell electrolytes, which can solve problems such as the reduction of film conductivity, and achieve the effects of improving ionic conductivity and oxygen ion mobility.
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[0011] 1. Experimental raw materials
[0012] 8% mol Y 2 o 3 : ZrO 2 Target material, purity 99.999%, size φ50.8×5.0mm, Hefei Kejing Material Technology Co., Ltd.; Ce 0.8 SM 0.2 o 2-δ Target (SDC), purity 99.999%, size φ50.8×5.0mm, Hefei Kejing Material Technology Co., Ltd.; MgO substrate, single-sided polishing, (110) crystal orientation, size 10×10×0.5mm, Hefei Kejing Materials Technology Co., Ltd.
[0013] 2. Experimental equipment
[0014] Table 1 Main experimental instruments and equipment
[0015]
[0016] 3. (SDC / YSZ) N The preparation process of the superlattice electrolyte thin film adopts the PLD-450 pulsed laser sputtering apparatus produced by the Shenyang Scientific Instrument Factory of the Chinese Academy of Sciences. The chamber is equipped with four independent targets. The laser is the COMPexPro201 produced by Coherent Inc. Pulsed excimer laser, the sputtering target is made of high-purity YSZ (0.08Y 2 o 3 : 0.92ZrO 2 ) target and SDC target (9...
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