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High-performance miniature supercapacitor and fabrication method thereof

A supercapacitor, high-performance technology, applied in hybrid capacitor electrodes, hybrid capacitor current collectors, etc., can solve the problems of low utilization of electrode material surface area, small capacitance, etc., achieve good pseudocapacitance characteristics, improve energy density, and improve efficiency. Effect

Active Publication Date: 2015-11-25
WUHAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, only the microporous surface that can be in contact with the electrolyte in the electrode material can generate capacitance. The deficiency of the existing electric double layer capacitors and pseudocapacitors is that the main part of the porous electrode surface area is micropores. Due to the effect of the surface tension of the electrolyte solution, It makes it difficult for the electrolyte solution to enter the micropores of the porous electrode, resulting in a low utilization rate of the surface area of ​​the electrode material, and even a phenomenon that some carbon electrode materials have a large specific surface area, but the capacitance after being made into a capacitor is not large.

Method used

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  • High-performance miniature supercapacitor and fabrication method thereof
  • High-performance miniature supercapacitor and fabrication method thereof
  • High-performance miniature supercapacitor and fabrication method thereof

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Embodiment 1

[0028] Such as figure 1 As shown, the preparation method of a high-performance miniature supercapacitor with a heterostructure of cobalt sulfide nanosheets modified by ruthenium oxide includes the following steps:

[0029] 1. Select the silicon substrate, cut the silicon substrate into an appropriate size, and then ultrasonically clean the silicon wafer with isopropyl alcohol (IPA) for about 3 minutes, and dry it with nitrogen;

[0030] 2. Use a spin coater to spin coat a layer of 9000A on the substrate. The spin coat speed is 4000r / min and the spin coat time is 40s. After homogenizing the glue, use an electric hot plate to bake at 100°C, 15min;

[0031] 3. Use a photolithography machine to etch the interdigital electrode pattern on the spin-coated silicon wafer, and the exposure time is 28s;

[0032] 4. Development: First immerse the photoetched substrate in RD6 developer solution for 90s, then put it in deionized water for 30s, then put it in the second part of deionized water for 30...

Embodiment 2

[0041] The preparation method of the high-performance miniature supercapacitor with the heterostructure of ruthenium oxide modified cobalt sulfide nanosheets includes the following steps:

[0042] 1. Select the silicon substrate, cut the silicon substrate into an appropriate size, and then ultrasonically clean the silicon wafer with isopropyl alcohol (IPA) for about 3 minutes, and dry it with nitrogen;

[0043] 2. Use a spin coater to spin coat a layer of 9000A on the substrate. The spin coat speed is 4000r / min and the spin coat time is 40s. After homogenizing the glue, use an electric hot plate to bake at 100°C, 15min;

[0044] 3. Use a photolithography machine to etch the interdigital electrode pattern on the spin-coated silicon wafer, and the exposure time is 28s;

[0045] 4. Development: First immerse the photoetched substrate in RD6 developer solution for 90s, then put it in deionized water for 30s, then put it in the second part of deionized water for 30s, and dry it with nitroge...

Embodiment 3

[0054] The preparation method of the high-performance miniature supercapacitor with the heterostructure of ruthenium oxide modified cobalt sulfide nanosheets includes the following steps:

[0055] 1. Select the silicon substrate, cut the silicon substrate into an appropriate size, and then ultrasonically clean the silicon wafer with isopropyl alcohol (IPA) for about 3 minutes, and dry it with nitrogen;

[0056] 2. Use a spin coater to spin coat a layer of 9000A on the substrate. The spin coat speed is 4000r / min and the spin coat time is 40s. After homogenizing the glue, use an electric hot plate to bake at 100°C, 15min;

[0057] 3. Use a photolithography machine to etch the interdigital electrode pattern on the spin-coated silicon wafer, and the exposure time is 28s;

[0058] 4. Development: First immerse the photoetched substrate in RD6 developer solution for 90s, then put it in deionized water for 30s, then put it in the second part of deionized water for 30s, and dry it with nitroge...

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Abstract

The invention relates to a high-performance miniature supercapacitor with a ruthenium oxide modified cobalt sulfide nanosheet heterostructure. The high-performance miniature supercapacitor comprises a substrate, wherein a metal current collector is deposited on the substrate to form an interdigital electrode, and the high-performance miniature supercapacitor is characterized in that the interdigital electrode is loaded with a ruthenium oxide modified nanosheet cobalt sulfide electrode material. The high-performance miniature supercapacitor has the advantages that the problem of low energy density of the capacitor is solved, the contact of the electrode material and an electrolyte is increased by using nanosheet cobalt sulfide, the charge transfer efficiency between the electrode material and the electrolyte is improved, the surface-modified ruthenium oxide has a favorable pseudo capacitor characteristic, more charges can be stored, the capacity of the device is improved, the energy density of the supercapacitor is further improved by the heterostrucutre combined by the electrode material and the electrolyte.

Description

Technical field [0001] The invention relates to a high-performance miniature supercapacitor with a heterostructure of cobalt sulfide nanosheets modified by ruthenium oxide. Background technique [0002] Due to the increasing shortage of petroleum resources and the more and more serious environmental pollution caused by the exhaust emissions of petroleum-burning internal combustion engines (especially in large and medium-sized cities), people are studying new energy devices that replace internal combustion engines. Research and development of hybrid power, fuel cell, chemical battery products and applications have been carried out, and certain results have been achieved. However, due to their inherent weaknesses such as short service life, poor temperature characteristics, environmental pollution by chemical batteries, complex systems, and high cost, there has been no good solution. With its excellent characteristics, supercapacitors can take advantage of their strengths and avoi...

Claims

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Application Information

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IPC IPC(8): H01G11/68H01G11/30
CPCY02E60/13
Inventor 麦立强肖蓓石孟竹田晓聪
Owner WUHAN UNIV OF TECH
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