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Novel flight time secondary ion mass spectrometer

A secondary ion mass spectrometry and time-of-flight technology, which is applied in the field of new time-of-flight secondary ion mass spectrometry, can solve the problems of low ionization efficiency, limitations, and performance that cannot exceed secondary ion mass spectrometry, etc., to achieve high utilization efficiency and improve ion analysis efficiency Effect

Inactive Publication Date: 2016-05-11
DALIAN NATIONALITIES UNIVERSITY
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Problems solved by technology

However, the traditional laser ionization method mentioned above is limited in the post-ionization application of secondary ion mass spectrometry due to its low ionization efficiency.
The main performance is that the performance cannot surpass the secondary ion mass spectrometry in terms of sensitivity.

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Examples

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Embodiment 1

[0035] Secondary neutral ionization efficiency test of pure silver target

[0036]This example is intended to illustrate the gain of the ionization efficiency of the femtosecond laser used in the present invention as the post-ionization method compared with the secondary ions produced by the bombardment of the primary ion source. In this example, O - The ion source serves as the primary ion source 2 . The beam diameter of the focused ion source is about 5 microns, and the energy is 15 keV. The following experiments are carried out in the pulsed mode of the ion source. The frequency is 1000 Hz and the pulse width is 200 microseconds. The pulsed ion beam is injected into the gold-plated sample surface and sputters secondary particles, which are then post-ionized by a femtosecond laser. The femtosecond laser emitted by the femtosecond laser 3 has a frequency of 1 kilohertz, a pulse width of 35-45 femtoseconds, and an energy of 3.6 watts. It is focused on the envelop position o...

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Abstract

The invention discloses a novel flight time secondary ion mass spectrometer. The structure of the novel flight time secondary ion mass spectrometer comprises a sample carriage, a primary ion source, a femtosecond laser device, an ion extraction system, a flight time ion mass analyzer and a signal generator. The novel flight time secondary ion mass spectrometer is a sensitive and efficient surface analysis device, and the device allows qualitative and quantitative analysis results of material components to be rapidly and accurately obtained. A femtosecond laser strong field off-resonance ionization technology is adopted to detect neutral particles, and the laser power can be controlled to simultaneously generate univalent and multivalent ions of a same element to provide a natural internal standard source for mass scaling of elements to be analyzed, so the mass of the elements to be analyzed can be accurately determined.

Description

Technical field: [0001] The invention relates to the field of secondary ion mass spectrometry (Secondary Ion Mass Spectrometry, SIMS) analysis. More specifically, the present invention relates to a novel time-of-flight secondary ion mass spectrometer incorporating femtosecond laser post-ionization technology, so that higher sensitivity and resolution can be obtained in the analysis process. Background technique: [0002] Secondary ion mass spectrometry technology is to inject a focused high-energy ion beam into the surface of a solid sample to generate corresponding sputtered ions (secondary ions). By analyzing the quality of the above-mentioned sputtered ions, the Composition information, especially important is that the method can obtain composition information of trace elements. Therefore, secondary ion mass spectrometry has important applications in the fields of microelectronics, material science, geology, and life science. However, secondary ion mass spectrometry als...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/64
CPCG01N27/64
Inventor 王利刘本康龙涛张玉海刘墩一
Owner DALIAN NATIONALITIES UNIVERSITY
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