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Film structure of reflective 0.532μm and 1.064μm, transparent 0.6μm-0.9μm spectral spectroscopic film

A technology of film structure and spectroscopic film, which is applied in optics, optical filters, optical components, etc., can solve the problems of not considering the angle of incidence of light bands, applicability limitations, and lack of wide application, so as to reduce and control wavelength drift risk, improve coating efficiency, and shorten the production cycle

Active Publication Date: 2018-08-28
西安应用光学研究所
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since this paper is a theoretical research for practical application, its practicality is not strong; at the same time, the film structure described in this paper is only used as a reflector and cannot be used to split light; moreover, the film structure Only under the condition of vertical incidence of light, the theoretical design did not consider the angle of incidence of light bands, so the applicability is limited; finally, the film structure is only realized on the polycarbonate (PC) substrate, so Its application is not extensive

Method used

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  • Film structure of reflective 0.532μm and 1.064μm, transparent 0.6μm-0.9μm spectral spectroscopic film
  • Film structure of reflective 0.532μm and 1.064μm, transparent 0.6μm-0.9μm spectral spectroscopic film
  • Film structure of reflective 0.532μm and 1.064μm, transparent 0.6μm-0.9μm spectral spectroscopic film

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] Example 1: The light is incident at an oblique angle of 15°, the transparent substrate adopts typical crown glass K9 glass, and the film structure is Glass|(2 / 3TiO 2 4 / 3SiO2 2 ) 12 |Air, high refractive index material titanium dioxide (TiO 2) and silicon dioxide are alternately superimposed on two thin film materials. Wherein, the first film layer is non-extreme titanium dioxide plated on the surface of the K9 glass substrate; the second film layer is silicon dioxide, plated on the first film layer; the third film layer is Titanium dioxide, plated on the second film layer; the fourth film layer is silicon dioxide, and plated on the third film layer; ..., titanium dioxide and silicon dioxide film layers alternate to non-extreme For the twenty-fourth film layer, the thicknesses of the first to twenty-fourth film layers are shown in Table 1.

[0024] Table 1 The thickness of each layer of film of embodiment 1

[0025] Layers

[0026] After testing, the refle...

Embodiment 2

[0027] Embodiment 2: The light is incident at an oblique angle of 25°, the transparent substrate adopts quartz glass, and the film structure is Glass|(2 / 3Ta 2 o 5 4 / 3SiO2 2 ) 14 |Air is composed of alternate superposition of two thin film materials, tantalum pentoxide and silicon dioxide. Wherein, the first film layer is non-extreme tantalum pentoxide plated on the surface of the quartz glass substrate; the second film layer is non-extreme silicon dioxide plated on the first film layer ; The third film layer is non-extreme value tantalum pentoxide, which is plated on the second film layer; the fourth film layer is non-extreme value silicon dioxide, which is plated on the third film layer;… ..., tantalum pentoxide and silicon dioxide film layers alternate until the non-extreme twenty-fifth, twenty-sixth, twenty-seventh, twenty-eighth film layers, the thickness of the first to twenty-eighth film layers See Table 2.

[0028] Table two The thickness of each layer film of embo...

Embodiment 3

[0031] Example 3: The light is incident at an oblique angle of 35°, the transparent substrate is made of typical crown glass K9 glass, and the film structure is Glass|(4 / 3ZrO 2 2 / 3SiO2 2 ) 18 |Air, made of zirconium dioxide (ZrO 2 ) and silicon dioxide are alternately superimposed on two thin film materials. Wherein, the first film layer is non-extreme zirconia plated on the surface of the K9 glass substrate; the second film layer is non-extreme silicon dioxide plated on the first film layer; The third film layer is non-extreme zirconia, which is plated on the second film layer; the fourth film layer is silicon dioxide, which is plated on the third film layer; ..., zirconium dioxide and silicon dioxide film layers alternately to non-extreme thirty-fourth, thirty-fifth and thirty-sixth film layers, and the thicknesses of the first to thirty-sixth film layers are shown in Table 3.

[0032] The thickness of each layer film of table three embodiment 3

[0033]

[0034] ...

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Abstract

The present invention provides a film system structure of a spectrum beam splitting film with reversed 0.532 [Mu]m and reversed 1.064 [Mu]m and transparent 0.6-0.9 [Mu]m. The film system structure comprises a transparent substrate and a beam splitting film system; the beam splitting film system is made of two types of thin-film materials H and silicon dioxide according to the structure Glass|2 / 3H4 / 3SiO2)m|Air or Glass|(4 / 3H2 / 3SiO2)m|Air, wherein the thin-film materials H are titanium dioxide, zirconium dioxide or tantalum pentoxide, and m is a repetition period; and the partial film layer of the beam splitting film system employs a non-maxima layer. The film system structure performs high reflection of the laser with 0.532 [Mu]m and 1.064 [Mu]m and high permeation of the light with 0.6-0.9 [Mu]m; and moreover, the film system structure of the spectrum beam splitting film with reversed 0.532 [Mu]m and reversed 1.064 [Mu]m and transparent 0.6-0.9 [Mu]m is able to go through the environment test such as high and low temperature storage, temperature shock and the like, the adhesion test and the moderate friction test.

Description

technical field [0001] The invention belongs to the technical field of optical thin films, and specifically relates to a film system structure of a 0.532 μm and 1.064 μm reflective and 0.6 μm-0.9 μm spectral spectroscopic film, which is used for multi-band common optical paths of airborne, ship-borne, and vehicle-mounted weapon platforms. system. Background technique [0002] The current high-performance weapon platform is constantly developing towards the direction of small size, flexible maneuverability, multi-functional integration, and all-weather combat. Multi-band co-window technology can combine multiple spectral bands such as visible, TV, laser and infrared, and complete it through a common window, so as to achieve the purpose of miniaturization, multi-functional integration, and all-weather combat of weapon platforms. Therefore, in Electro-optical systems are increasingly used in cutting-edge weapons platforms. The film structure of reflective 0.532μm and 1.064μm ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B5/20G02B5/26C03C17/34
CPCC03C17/3417G02B5/201G02B5/26
Inventor 赵兴梅董莹
Owner 西安应用光学研究所