A kind of manufacturing process of crystalline silicon solar cell

A solar cell and manufacturing process technology, applied in sustainable manufacturing/processing, final product manufacturing, semiconductor/solid-state device manufacturing, etc., can solve problems such as the inability to cover the bottom of the fleece layer, and achieve photoelectric conversion efficiency, cost reduction, and improvement The effect of productivity
CN105870249BActive Publication Date: 2017-10-03JIANGSU MICROVIA NANO EQUIP TECH CO LTD
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Patent Information

Authority / Receiving Office
CN ยท China
Patent Type
Patents(China)
Current Assignee / Owner
JIANGSU MICROVIA NANO EQUIP TECH CO LTD
Publication Date
2017-10-03

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Abstract

The invention relates to the field of fabrication of a solar cell, in particular to a surface passivation and anti-reflection technology of crystalline silicon cell for improving photoelectric conversion efficiency. Aiming at the existing cell technology process flow, nanometer lamination of a material such as SiO2, Al2O3 and SiNx and a composite material are fabricated by atomic layer deposition and plasma atomic layer deposition, passivation layer plating is carried out on the front surface and the back surface of the crystalline silicon cell, so that the minority carrier lifetime is prolonged, and the photoelectric conversion efficiency of the cell is improved; and SiNx anti-reflection layer plating can be continuously carried out after passivation layer plating, so that passivation and anti-reflection processes can be integrated in the same flow, the cost is reduced, and the yield is improved. The fabrication method is particularly and suitably used for combining with a black silicon technology, and multiple processes are avoided; and moreover, for a double-sided battery, the fact that double-sided passivation is carried out by using the fabrication method is a necessary choice.
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Description

technical field

[0001] The invention relates to the field of solar cell manufacturing, in particular to the surface passivation and anti-reflection technology of crystalline silicon cells for improving photoelectric conversion efficiency. Background technique

[0002] High-efficiency crystalline silicon cells are an important development trend of the photovoltaic industry. In order to maximize the photoelectric conversion efficiency of crystalline silicon cells, surface texturing and passivation processes are necessary means for high-efficiency cell manufacturing, such as passivated emitter back cells, that is, PERC cell technology has attracted much attention. And the battery production technology is also continuously improving and improving. Among them, black silicon technology combined with back passivation technology can achieve a conversion efficiency of more than 20%.

[0003] Different from ordinary acid texturing, the RIE etching black silicon technology, which is ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
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