Method of coating a separator for a fuel cell and a separator for a fuel cell
A fuel cell and separator technology, which is applied to fuel cell components, fuel cells, power system fuel cells, etc., can solve the problems of laminate performance degradation, contact resistance increase, MEA pollution, etc., and achieve high connection performance and reduce Deformation, the effect of reducing production costs
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Embodiment approach 1
[0099] A precursor including a compound represented by the following Chemical Formula 3 was heated and vaporized at 65° C. to obtain a precursor gas.
[0100] [chemical formula 3]
[0101]
[0102] A stainless steel (eg, SUS316L) having a thickness of 0.1 mm is manufactured as a substrate. The substrate was washed with ultrasonic waves using ethanol and acetone to remove impurities on the surface of the substrate, and then treated with 5% DHF for 5 minutes to remove the surface oxide film (Cr 2 o 3 ).
[0103] Subsequently, the precursor gas, 100 sccm of NH 3 , and 200 sccm of Ar was introduced into the reaction chamber. At this time, the internal pressure of the reaction chamber was maintained at 0.8 Torr.
[0104] Subsequently, a voltage of 600 V was applied to the reaction chamber so that the gas could be converted into a plasma state, and deposition was performed on the substrate to form a titanium nitride (TiN) coating having a thickness of 20 nm.
[0105] After ...
Embodiment approach 2
[0109] The thickness of the carbon coating was adjusted to 5 nm. Other processes are the same as in Exemplary Embodiment 1.
Embodiment approach 3
[0111] The thickness of the carbon coating was adjusted to 15 nm. Other processes are the same as in Exemplary Embodiment 1.
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