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Ti-Al-Mo-N multi-component hard gradient film as well as preparation method and application thereof

A multi-component, gradient film technology, applied in the direction of ion implantation plating, metal material coating process, coating, etc., to achieve simple production methods, improve corrosion resistance, coating wear resistance, and high ionization rate Effect

Active Publication Date: 2016-11-16
长沙科辉炉业科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

2. The bonding force between the film base and the bonding force between the film layers
But so far, the wear-resistant and corrosion-resistant Ti-Al-Mo-N multi-component hard gradient coating material prepared by arc ion plating on the surface of the substrate such as SKD2 ink scraper has not been reported at home and abroad.

Method used

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  • Ti-Al-Mo-N multi-component hard gradient film as well as preparation method and application thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0054] (1) Determination of deposition technology and preparation of alloy targets:

[0055] The Bulat-6 multi-arc ion coating machine is used to deposit the coating. The coating machine is composed of a vacuum system, a coating system, and an electrical control system without an additional magnetic filter system. There are three arc sources in the coating chamber, and the arc sources on the left and right sides are used to initiate arc deposition.

[0056] The design, selection and preparation of the target material: when TIN coating is applied, the commercially pure titanium target purchased is selected, the purity is 99.9%, and the shape of the titanium target is processed into a circular target with a diameter of φ60mm and a thickness of 42mm according to the requirements of the equipment. When the Ti-Al-Mo-N coating is applied, the target material is a self-made alloy target. The composition of the alloy target is designed as follows: the mass percentage of Ti is 75%, th...

Embodiment 2

[0068] (1) Determination of deposition technology and preparation of alloy targets:

[0069] The Bulat-6 multi-arc ion coating machine is used to deposit the coating. The coating machine is composed of a vacuum system, a coating system, and an electrical control system without an additional magnetic filter system. There are three arc sources in the coating chamber, and the arc sources on the left and right sides are used to initiate arc deposition.

[0070] The design, selection and preparation of the target material: when TIN coating is applied, the commercially pure titanium target purchased is selected, the purity is 99.9%, and the shape of the titanium target is processed into a circular target with a diameter of φ60mm and a thickness of 42mm according to the requirements of the equipment. When the Ti-Al-Mo-N coating is applied, the target material is a self-made alloy target. The composition of the alloy target is designed as follows: the mass percentage of Ti is 75%, th...

Embodiment 3

[0082] (1) Determination of deposition technology and preparation of alloy targets:

[0083] The Bulat-6 multi-arc ion coating machine is used to deposit the coating. The coating machine is composed of a vacuum system, a coating system, and an electrical control system without an additional magnetic filter system. There are three arc sources in the coating chamber, and the arc sources on the left and right sides are used to initiate arc deposition.

[0084] The design, selection and preparation of the target material: when TIN coating is applied, the commercially pure titanium target purchased is selected, the purity is 99.9%, and the shape of the titanium target is processed into a circular target with a diameter of φ60mm and a thickness of 42mm according to the requirements of the equipment. When the Ti-Al-Mo-N coating is applied, the target material is a self-made alloy target. The composition of the alloy target is designed as follows: the mass percentage of Ti is 70%, th...

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Abstract

The invention relates to a Ti-Al-Mo-N multi-component hard gradient film as well as a preparation method and application thereof, and belongs to the technical field of special material preparation. The Ti-Al-Mo-N multi-component hard gradient film comprises the following components in percentage by mass: 55-85% of Ti, 8-30% of Al, 4-15% of Mo and 3-25% of N. Through arc ion plating, the Ti-Al-Mo-N multi-component hard gradient film can be prepared into a coating with a substrate / TiN / Ti-Al-Mo-N, and the coating can be applied to the fields of papermaking and printing. The preparation method provided by the invention is reasonable in component design, simple in technology, and convenient for large-scale application, especially the large-scale application to the field of printing.

Description

technical field [0001] The invention relates to a Ti-Al-Mo-N multi-component hard gradient film and a preparation method and application thereof; it belongs to the technical field of preparation of special materials. Background technique [0002] Arc ion plating is to trigger the ignition arc between the cathode and the anode. The arc discharge is only carried out at one or several dense arc spots on the surface of the target. The whole moving target is consumed evenly. In cathodic arc deposition, the deposition material is evaporated by the action of vacuum arc. In the arc line, the source material is used as the cathode. Most of the basic processes of the arc occur at the arc point in the cathode area. The typical size of a few micrometers, and have a very high current density. The evaporated product obtained by arc evaporation consists of electrons, ions, neutral gas phase atoms and particles. The plasma is directly generated from the cathode without a molten pool, and ...

Claims

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Application Information

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IPC IPC(8): C23C14/32C23C14/06
CPCC23C14/0641C23C14/325
Inventor 周宏明刘亚雄李荐胡雪仪简帅
Owner 长沙科辉炉业科技有限公司
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