Sapphire polishing process

Abstract

The invention discloses a sapphire polishing process. The sapphire polishing process comprises the following steps: performing raw material pre-treatment, performing accurate grinding, polishing, cleaning, testing and the like. According to the sapphire polishing process, the surface of a raw material is ground through the raw material pre-treatment and accurate grinding processes; the difficulty in polishing is reduced; the polishing time is saved; a polishing solution which is prepared from aluminium oxide is high in hardness, and a chemical reaction is produced in a process of rubbing a sapphire, so that CMP (Chemical Mechanical Polishing) is performed effectively; the stability is high; the cost is low; the stability of the polishing solution is improved through an FA/O compound active agent; the flatness of a polished surface and the work efficiency are improved; through experiments, the removal rate of the polishing is 6 mu m/hr when the pressure value is 4 psi, the rotating speed is 60 rpm, and the pH value is 10; the removal rate of the polishing is 8 mu m/hr when the pressure value is 5 psi, the rotating speed is 60 rpm, and the pH value is 10. The process flow of the sapphire polishing process is simple; meanwhile, the cost is saved; the sapphire polishing process is worth being popularized in the future.

Description

technical field [0001] The invention relates to the technical field of sapphire polishing, in particular to a sapphire polishing process. Background technique [0002] The hardness of sapphire crystal is very high, Mohs hardness is 9, second only to diamond, it has good light transmission, thermal conductivity and electrical insulation, good mechanical and mechanical properties, and has the characteristics of wear resistance and wind erosion resistance, sapphire The melting point of the crystal is 2050°C, the boiling point is 3500°C, and the maximum operating temperature can reach 1900°C. The sapphire crystal still has good stability at high temperatures, and has good transmittance in the range of visible and infrared light. LEDs, mobile phones and other optoelectronics, communications, and national defense fields are widely used, and all require sapphire to have good surface processing accuracy and surface integrity. Due to the high hardness and high chemical stability of s...

AI Technical Summary

Problems solved by technology

[0002] The hardness of sapphire crystal is very high, Mohs hardness is 9, second only to diamond, it has good light transmission, thermal conductivity and electrical insulation, good mechanical and mechanical properties, and has the characteristics of wear resistance and wind erosion resistance, sapphire The melting point of the crystal is 2050°C, the boiling point is 3500°C, and the maximum operating temperature can reach 1900°C. The sapphire crystal still has good stability at high temperatures, and has good transmittance in the range of visible and infrared light. LEDs, mobile phones and other optoelectronics, communications, and national defense fields are widely used, and all require sapphire to have good surface processing accuracy and surface integrity. Due to the high hardness and high chemical stability of sapphire crystals, sapphire has high efficiency and low damage. Processing technology has become the main obstacle hindering the widespread application of sapphire. At present, the growth technology of sapphire crystals with a size of more than 100kg is becoming mature. In order to obtain substrates for blue LED chips or sapphire windows for other applications, sapphire After the crystals go through the process of digging, cutting and grinding, they need to be precision polished to reduce the surface roughness. At present, only chemical mechanical polishing technology can obtain lower surface roughness and higher material removal rate at a lower cost. However, due to the high hardness and high chemical stability of sapphire crystals, the whole process is very time-consuming, labor-intensive, and low in processing efficiency, which seriously affects the large-scale industrial application of sapphire crystal sheets.