Polishing pad and method for producing same
A manufacturing method and technology of polishing pads, which are applied in the field of polishing pads, can solve problems such as poor flatness of objects to be polished, and achieve the effects of excellent flattening characteristics, fast polishing speed, and suppressing scratches
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Embodiment 1
[0113] 10.2 parts by weight of 3-isocyanatopropyltriethoxysilane (manufactured by Shin-Etsu Chemical Co., Ltd., KBE-9007), toluene diisocyanate (2,4-body / 2,6-body=80 / 20 mixture, TDI-80) 37.8 parts by weight, polycaprolactone triol (manufactured by Daicel Chemical Industries, Ltd., PCL305, hydroxyl value: 305 mgKOH / g, number of functional groups: 3) 22.6 parts by weight, number average molecular weight 650 26.5 parts by weight of polytetramethylene ether glycol (PTMG650) and 2.9 parts by weight of diethylene glycol (DEG). At this time, the NCO index is 1.9, reacted at 75 ° C for 3 hours, and prepared isocyanate-terminated prepolymer (NCO wt% is 9.12 wt%, hereinafter referred to as Si-prepolymer).
[0114] 75 parts by weight of a polyether prepolymer (manufactured by Uniroyal Co., Ltd., Ajiplen L-325), 25 parts by weight of the prepared Si-prepolymer, and a polysiloxane-based surface were added to the reaction vessel. 3 parts by weight of an active agent (manufactured by Golds...
Embodiment 2~8、 comparative example 1~3
[0117] A polishing pad was produced in the same manner as in Example 1 except that the formulation described in Table 1 was used. The hydrophilic prepolymers in Table 1 were prepared by the following method.
[0118] 40 parts by weight of polyethylene glycol (PEG, manufactured by Daiichi Kogyo Pharmaceutical Co., Ltd., with a number average molecular weight of 1000), and 12.8 parts by weight of polyethylene glycol (PEG, manufactured by Daiichi Kogyo Pharmaceutical Co., Ltd., with a number average molecular weight of 600) were placed in the reaction vessel. parts, DEG6 parts by weight, dehydration under reduced pressure for 1 to 2 hours while stirring. Then, nitrogen was introduced into the separable flask, and TDI-80 (41.2 parts by weight) was added after nitrogen substitution. While keeping the temperature in the reaction system at about 70°C, the mixture was stirred until the reaction was completed. The end of the reaction was when NCO% reached a substantially constant val...
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