Method for preparing antifriction wear-resistant F-DLC film on titanium alloy surface

An anti-friction and anti-wear, F-DLC technology, applied in metal material coating process, gaseous chemical plating, coating and other directions, to achieve the effect of improving stability, solving preparation problems, and improving tribological performance

Inactive Publication Date: 2017-03-15
CHONGQING UNIV OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The object of the present invention is to provide a kind of method for preparing anti-friction and anti-wear F-DLC film on the surface of titanium alloy for above problem, the F-DLC film deposited on the surface of titanium alloy by this method has anti-friction and anti-wear functi

Method used

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  • Method for preparing antifriction wear-resistant F-DLC film on titanium alloy surface
  • Method for preparing antifriction wear-resistant F-DLC film on titanium alloy surface
  • Method for preparing antifriction wear-resistant F-DLC film on titanium alloy surface

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Effect test

Embodiment 1

[0021] To prepare anti-friction and anti-wear F-DLC film on the surface of titanium alloy Ti-6Al-4V substrate, follow the steps below:

[0022] 1) Pretreatment: Polish the surface of Ti-6Al-4V to reduce the surface roughness to less than 10nm, then immerse it in acetone and alcohol solvents and perform ultrasonic cleaning for 15min to remove the dirt on the surface of the alloy. Dry and set aside.

[0023] 2) Sputter cleaning: put the dried Ti-6Al-4V into the middle of two horizontally parallel plates in the reaction chamber of the HP-PECVD deposition system, and vacuumize the reaction chamber. When the pressure in the reaction chamber is lower than 10 -4 Pa, feed argon and keep the pressure of the reaction chamber at 1.3Pa, apply a pulse bias of -8kV on the plate, control the duty cycle to 15%, and the pulse frequency to 1200Hz to sputter the Ti-6Al-4V in the reaction chamber Shot cleaning for 20min.

[0024] 3) Deposition of Si transition layer: After sputtering and cleani...

Embodiment 2

[0028] To prepare anti-friction and anti-wear F-DLC film on the surface of titanium alloy Ti-6Al-4V substrate, follow the steps below:

[0029] 1) Pretreatment: Polish the surface of Ti-6Al-4V to reduce the surface roughness to less than 10nm, and then immerse it in acetone and alcohol solvents for 20 minutes of ultrasonic cleaning to remove the dirt on the alloy surface, and then use nitrogen Blow dry and set aside.

[0030] 2) Sputter cleaning: put the dried Ti-6Al-4V into the middle of two horizontally parallel plates in the reaction chamber of the HP-PECVD deposition system, and vacuumize the reaction chamber. When the pressure in the reaction chamber is lower than 10 -4 Pa, feed argon and keep the pressure of the reaction chamber at 2.0Pa, apply a pulse bias of -13kV on the plate, control the duty cycle to 25%, and the pulse frequency to 1500Hz to sputter the Ti-6Al-4V in the reaction chamber Shot cleaning for 30min.

[0031] 3) Deposition of Si transition layer: After ...

Embodiment 3

[0035] To prepare anti-friction and anti-wear F-DLC film on the surface of titanium alloy Ti-6Al-4V substrate, follow the steps below:

[0036] 1) Pretreatment: Polish the surface of Ti-6Al-4V to reduce the surface roughness to less than 10nm, and then immerse it in acetone and alcohol solvents for 30 minutes of ultrasonic cleaning to remove the dirt on the alloy surface, and then use nitrogen Blow dry and set aside.

[0037] 2) Sputter cleaning: put the dried Ti-6Al-4V into the middle of two horizontally parallel plates in the reaction chamber of the HP-PECVD deposition system, and vacuumize the reaction chamber. When the pressure in the reaction chamber is lower than 10 -4 Pa, feed argon and keep the pressure of the reaction chamber at 2.5Pa, apply a pulse bias of -15kV on the plate, control the duty cycle to 35%, and the pulse frequency to 1500Hz to sputter the Ti-6Al-4V in the reaction chamber Shot cleaning for 28 minutes.

[0038] 3) Deposition of Si transition layer: A...

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Abstract

The invention discloses a method for preparing an antifriction wear-resistant F-DLC film on a titanium alloy surface. A plate hollow cathode HP-PECVD method is adopted. According to the plate hollow cathode HP-PECVD method, on the basis of a traditional PECVD method, a sample disk for carrying samples in an existing deposition system reaction chamber is changed into two parallel plates; a base body is placed between the two plates; negative bias voltage is applied to the space between the two plates to form a hollow cathode effect. The method specifically comprises the following steps of (1) pretreatment; (2) sputter cleaning; (3) deposition of a Si transition layer; and (4) deposition of the F-DLC film. The F-DLC film deposited on the titanium alloy surface through the method has the antifriction wear-resistant function, the tribology performance of titanium alloy in the vivo environment can be improved, and the problem that aseptic loosening complications caused by frictional wear of titanium alloy artificial joints is solved.

Description

technical field [0001] The invention belongs to the technical field of biomedical materials, and relates to a method for preparing an F-DLC film, in particular to a method for preparing an anti-friction and anti-wear F-DLC film on the surface of a titanium alloy. Background technique [0002] Due to their small specific gravity, strong corrosion resistance, and excellent biocompatibility, titanium and titanium alloys are widely used in the biomedical field, especially as hard tissue replacements such as artificial joints, artificial tooth implants, and bone trauma products. Or repair medical device product materials. At the same time, with the widespread use of titanium and titanium alloy materials, its complications have become increasingly apparent. Among them, aseptic loosening is considered to be the most dangerous one with the highest incidence rate. The important factor leading to aseptic loosening is the wear debris generated during the friction and wear process of ...

Claims

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Application Information

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IPC IPC(8): C23C16/26C23C16/24C23C16/02C23C16/517
CPCC23C16/0245C23C16/24C23C16/26C23C16/517
Inventor 王军军王林青黄伟九马建军何浩然
Owner CHONGQING UNIV OF TECH
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