A kind of perc solar cell structure and preparation technology thereof

A solar cell and preparation technology, applied in the direction of sustainable manufacturing/processing, circuits, electrical components, etc., can solve the problems of LID light-induced attenuation increase, pollution, hidden cracks, etc., to increase process complexity, enrich hydrogen sources, The effect of preventing leakage
CN106653871BActive Publication Date: 2019-01-08HENGDIAN GRP DMEGC MAGNETICS CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
HENGDIAN GRP DMEGC MAGNETICS CO LTD
Publication Date
2019-01-08

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Abstract

The invention discloses a PERC solar cell structure and a preparation process thereof. The PERC solar cell structure comprises a cell piece body. A SiO2 layer, an anti-reflection layer and an AlOx layer are successively deposited / grown on the front surface of the cell piece body. An AlOx layer and a SiNx layer are successively deposited on the back surface of the cell piece body. On the basis of a conventional PERC cell preparation process, a surface oxidation doping process is used. In addition, the PERC battery process is adjusted. A unique surface passivation layer deposition process is also used. The beneficial effect of the preparation process is that effective doping in an oxidation process improves the surface impurity concentration of the cell, improves the FF of the cell, compensate the deterioration of the FF due to the local contact on the back surface; and the adjustment of the PERC cell process solves edge electric leakage due to doping process so as to simply the process, thereby improving the conversion efficiency of the cell and providing a better hydrogenation effect for the subsequent photonic recovery process of the PERC battery so as to achieve anti-LID.
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Description

technical field

[0001] The invention relates to the technical field related to the manufacture of crystalline silicon solar cells, in particular to a structure of a PERC solar cell and a preparation process thereof. Background technique

[0002] PERC cells use back passivation technology to effectively reduce the surface recombination rate and achieve the purpose of improving conversion efficiency. With the need to reduce the cost of photovoltaic power generation and the market's increasingly strong demand for high-efficiency components, the wave of mass production of PERC cells has officially arrived. In the promotion of mass production of PERC cells, in addition to the need to solve quality problems such as pollution and cracks, the other two key issues that need to be overcome are the low FF (fill factor) due to the local contact on the back and the quality of the passivation on the back. Increased LID (Light Induced Decay) due to lift.

[0003] Judging from the current...

Claims

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