A Method of Fabricating Spherical Concave Mirrors on Optical Waveguides Based on Laser Ring Etching

Abstract

The invention discloses a method for preparing a spherical concave mirror on an optical waveguide based on laser annular etching. According to the method, the coupling loss caused by unmatched optical waveguide-optical fiber vertical coupling factor numerical apertures is reduced. The method comprises the following machining flows: determining a machining region on the optical waveguide, and determining a radius r'=R / 2 of a laser round etching route according to the radius R of a to-be-machined reflecting spherical concave surface, wherein the round center of the reflecting spherical concave surface and the round center of the round etching route coincide; selecting laser etching mask figures which can be rounds, ovals, free curvilinear figures and the like; rotationally etching a mask along the round etching route, wherein the round center of the mask always moves along the round etching route, one point of periphery of the mask always coincides with the round center of the reflecting spherical concave surface, and the points of peripheries formed by virtue of the radiuses ri have different etching depths; carrying out rotary laser etching for one cycle, so as to form a sphere-similar reflecting concave surface; and processing the obtained double-side spherical reflecting concave surface, so as to obtain a single-side spherical reflecting concave surface.

Description

Technical field [0001] The invention relates to the field of micro-processing and manufacturing, and proposes a method for preparing a spherical concave mirror on an optical waveguide based on laser ring etching. Background technique [0002] In recent years, with the continuous increase in data processing speed requirements in the fields of broadband communications, supercomputers and big data centers, the research on high-speed bandwidth (≥50Gbps) related technologies has been promoted. The optical interconnection backplane technology based on Printed Circuit Board (PCB) has the advantages of high bandwidth, low energy consumption, and low cost, and has become a research hotspot in the field of high-end equipment information interconnection technology in recent years. [0003] At present, optical waveguides based on polymers are the most common optical waveguides, and vertical coupling technology is one of the key technologies for optical interconnection applications. How to achi...

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Problems solved by technology

The patent (publication number: CN 1272182A) uses a chemical etching method to prepare a concave mirror, but this preparation method has problems such as low precision, complicated process, and convergence effect in only one direction; the patent (publication number: CN 103395739A) proposes a The method of making concave mirrors using the non-aggression of water molecules has high requirements on materials, and the droplet shape is difficult to control, so there are disadvantages of complicated process and low precision; "Design and fabrication of embedded micro-mirror inserts for out-of -plane coupling in PCB level optical interconnections” proposes deep proton writing (DPW) technology to process concave mirrors on optical waveguides, but it still has the disadvantages of complex process and difficult mass production

The method for preparing the above concave mirror has many problems in terms of materials, preparation technology, processing accuracy, etc., and it is difficult to meet the requirements of large-scale industrial production of optical backplanes.

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