Gold-lead zirconate titanate nanocomposite ferroelectric thin film material and preparation method thereof

A ferroelectric thin film and nano-composite technology, applied in circuits, capacitors, electrical components, etc., can solve the problems of low polarization intensity and achieve the effect of increasing polarization intensity, simple method, and uniform composition

Inactive Publication Date: 2017-05-31
INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Aiming at the relatively small ferroelectric remanent polarization intensity of polycrystalline ferroelectric thin films, the present invention provides a novel gold-le

Method used

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  • Gold-lead zirconate titanate nanocomposite ferroelectric thin film material and preparation method thereof
  • Gold-lead zirconate titanate nanocomposite ferroelectric thin film material and preparation method thereof
  • Gold-lead zirconate titanate nanocomposite ferroelectric thin film material and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0022] Embodiment 1 (molar composition is Au:0.6mol%, Pb (Zr 0.4 Ti 0.6 )O 3 :99.4mol%)

[0023] Step 1: Prepare the solution

[0024] With water, acetic acid and isopropanol as solvent, chloroauric acid, lead acetate, zirconium n-propoxide and titanium isopropoxide as solute, according to Pb:Ti:Zr molar ratio is 5:3:2, according to Au:Pb( Zr 0.4 Ti 0.6 )O 3 The molar ratio is 0.006:1, take chloroauric acid, lead acetate, zirconium n-propoxide and titanium isopropoxide, add water, acetic acid and isopropanol respectively with the concentration standard of 0.4mol / L, then carry out at room temperature Stir until the chloroauric acid, lead acetate, zirconium n-propoxide and titanium isopropoxide are all dissolved to obtain a light yellow transparent solution;

[0025] Step 2: Preparation of film material

[0026] (1) Using Pt / Ti / SiO 2 / Si(100) substrate. Drop the solution prepared in step 1 onto the substrate for spin coating at a speed of 1500 rpm for 10 seconds, then ...

Embodiment 2

[0031] Embodiment 2 (molar composition is Au: 1.2mol%, Pb (Zr 0.4 Ti 0.6 )O 3 :98.8mol%)

[0032] Step 1: Prepare the solution

[0033] With water, acetic acid and isopropanol as solvent, chloroauric acid, lead acetate, zirconium n-propoxide and titanium isopropoxide as solute, according to Pb:Ti:Zr molar ratio is 5:3:2, according to Au:Pb( Zr 0.4 Ti 0.6 )O 3 The mol ratio is 0.012:1, take by weighing chloroauric acid, lead acetate, zirconium n-propoxide and titanium isopropoxide, add water, acetic acid and isopropanol respectively with the concentration standard of 0.4mol / L, then carry out at room temperature Stir until the chloroauric acid, lead acetate, zirconium n-propoxide and titanium isopropoxide are all dissolved to obtain a light yellow transparent solution;

[0034] Step 2: Preparation of film material

[0035] (1) Using Pt / Ti / SiO 2 / Si(100) substrate. Drop the solution prepared in step 1 onto the substrate for spin coating at a speed of 1500 rpm for 10 sec...

Embodiment 3

[0040]Embodiment 3 (molar composition is Au:1.2mol%, PbTiO 3 :98.8mol%)

[0041] Step 1: Prepare the solution

[0042] With water, acetic acid and isopropanol as solvent, chloroauric acid, lead acetate, titanium isopropoxide as solute, according to Au:PbTiO 3 The molar ratio is 0.012:1, take by weighing chloroauric acid, lead acetate, titanium isopropoxide, add water, acetic acid and isopropanol respectively with the concentration standard of 0.4mol / L, then stir at room temperature, stir until chlorine Auric acid, lead acetate, and titanium isopropoxide are all dissolved until a light yellow transparent solution is obtained;

[0043] Step 2: Preparation of film material

[0044] (1) Using Pt / Ti / SiO 2 / Si(100) substrate. Drop the solution prepared in step 1 onto the substrate for spin coating at a speed of 1500 rpm for 10 seconds, then increase the speed to 4000 rpm for 40 seconds to obtain a raw material film;

[0045] (2) Dry the raw film at 120°C for 10 minutes, therma...

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Abstract

The invention provides a gold-lead zirconate titanate nanocomposite ferroelectric thin film material and a preparation method thereof. The thin film material has a molar composition of 0.6 to 12 mol% of Au and 88 to 99.4 mol% of Pb(Zr, Ti)O3, and the ferroelectric remanent polarization of the thin film material is 30 to 80 muC/cm<2>. The material preparation method comprises steps: according to the material molar ratio requirements, lead acetate, zirconium n-propoxide, titanium propoxide and chloroauric acid are weighed; with water, isopropanol and acetic acid as a solvent, a light yellow transparent solution is obtained after thoroughly stirring; then, the obtained solution is placed on a Pt/Ti/SiO2/Si bottom electrode material, and a chemical solution deposition method is adopted for spin coating and film forming; then, the raw material film is dried at a temperature of 120 DEG C for 10 minutes, thermal decomposition of an organic matter at a temperature of 350 DEG C for 10 minutes is carried out, the temperature rises to 600 DEG C, annealing is carried out, and after 30 minutes, air cooling is carried out; and the above process is repeated for multiple times to obtain the gold-lead zirconate titanate nanocomposite ferroelectric thin film material with a needed thickness. The thin film material has a wide application prospect in fields such as memories, super capacitors and solar photovoltaic cells.

Description

technical field [0001] The invention belongs to the fields of electronic materials, functional materials and intelligent materials, and specifically provides a gold-lead zirconate titanate nanocomposite ferroelectric film material and a preparation method thereof. Background technique [0002] Ferroelectric thin film materials are a kind of functional thin film materials with spontaneous polarization, and the spontaneous polarization can be turned with the external electric field. Moreover, ferroelectric thin film materials also have photoelectric effect, piezoelectric effect, pyroelectric effect, etc., so that lead zirconate titanate (Pb(Zr,Ti)O 3 , PZT), barium titanate (BaTiO 3 , BTO), bismuth ferrite (BiFeO 3 , BFO) and other ferroelectric thin-film materials have shown broad application prospects in the fields of memory, supercapacitors and solar photovoltaic cells. [0003] Generally speaking, the basic configuration of the above-mentioned types of new functional de...

Claims

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Application Information

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IPC IPC(8): H01L23/64
CPCH01L28/40
Inventor 王占杰白宇
Owner INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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