Method and device for precise and controllable cutting of graphene ribbons by photocatalytic oxidation

Abstract

The invention relates to a method and device for precise and controllable cutting of graphene ribbons by photocatalytic oxidation, characterized in that: step 1: fixing graphene with a substrate on a two-dimensional micro-motion stage driven by piezoelectric ceramics ; Step 2: Use the magnetostrictive mechanism and the power controller to realize the Z-direction positioning of the semiconductor probe; Step 3: Use the atomizer to atomize the auxiliary liquid, and the atomized auxiliary liquid is adsorbed on the surface of the semiconductor probe; Four: The ultraviolet light emitted by the ultraviolet light source is focused by the condenser and irradiated on the semiconductor probe by the light source transmission device. At the same time, combined with the ultra-precise movement of the two-dimensional micro-motion table in the X and Y directions, the cutting of graphene ribbons with different two-dimensional patterns is realized. The invention solves the problems of equipment corrosion, environmental pollution, human injury and easy failure caused by the use of traditional strengthening reagents, as well as the problems of expensive equipment, complicated operating conditions and difficult control caused by plasma and transition metals.

Description

technical field [0001] The invention belongs to the field of ultra-precision cutting and processing, and relates to a method and a device for precisely and controllably cutting graphene ribbons by using photocatalytic oxidation. Background technique [0002] Graphene is made of carbon atoms with sp ²The hexagonal honeycomb lattice planar film composed of hybrid orbital connections is a new two-dimensional material with a thickness of only one carbon atom, and is the basic unit for constructing all other dimensional graphite materials. Graphene not only has extraordinary electrical properties (electron mobility at room temperature can reach 2×10 5 cm 2 / (V s), which is tens to hundreds of times that of traditional semiconductor materials), outstanding specific surface area (2630m 2 / g), excellent thermal conductivity (5000 W / (m K)), and also has some unique properties, such as a series of properties such as perfect quantum tunneling effect and never-disappearing electrical...

AI Technical Summary

Problems solved by technology

[0006] The present invention solves the problem of extremely high width and edge structure requirements of graphene ribbons in the field of electronics, and the difficulty in achieving controllable and smooth edge cutting of graphene in current manufacturing methods. The traditional AFM probe scribing technology has problems such as warped and rough edges of graphene caused by excessive mechanical action. A new method and device for precise and controllable cutting of graphene using photocatalytic excitation of chemical shears is proposed.

It solves the problems of equipment corrosion, environmental pollution, human injury, and easy failure caused by the use of traditional strengthening reagents, as well as the problems of expensive equipment, complicated operating conditions, and difficult control caused by plasma and transition metals.

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