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Chalcogenide glass coated with infrared diamond-like protective film and preparation method of chalcogenide glass

A diamond-like film, chalcogenide glass technology, applied in sputtering coating, ion implantation coating, vacuum evaporation coating and other directions, can solve the problems of inability to deposit, surface wrinkles, substrate failure, etc., and achieve excellent infrared optical properties, The film base has strong bonding force and good wear resistance.

Active Publication Date: 2017-09-05
CHINA BUILDING MATERIALS ACAD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in the actual deposition process, the temperature of the PECVD cathode plate continues to rise during the continuous bombardment of ions, while the transition temperature of the chalcogenide glass is very low (IG6,As 40 Se 60 Only 185±5°C), leading to deformation of chalcogenide glass during the coating process, obvious wrinkles on the surface, seriously changing the processing surface of the substrate, and making the substrate invalid
At the same time, influenced by chalcogenide glass (12.6-14.7)×10 -6 K -1 and DLC film (2-5) x 10 -6 K -1 The mismatch of thermal expansion coefficients between the two will inevitably generate residual stress between the chalcogenide glass and the DLC film, causing the DLC film to crack and cannot be deposited on the surface of the chalcogenide glass

Method used

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  • Chalcogenide glass coated with infrared diamond-like protective film and preparation method of chalcogenide glass
  • Chalcogenide glass coated with infrared diamond-like protective film and preparation method of chalcogenide glass
  • Chalcogenide glass coated with infrared diamond-like protective film and preparation method of chalcogenide glass

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preparation example Construction

[0028] A method for preparing a chalcogenide glass whose surface is coated with an infrared diamond-like protective film that an embodiment of the present invention proposes comprises:

[0029] 1) Clean the surface of the chalcogenide glass substrate with a mixed liquid of alcohol and ether, put it on the sample stage of the vacuum chamber, adjust the distance between the target and the sample stage, close the baffle between the target and the sample stage, and turn off the vacuum chamber, vacuumize;

[0030] 2) Coating a diamond-like carbon film on the chalcogenide glass substrate by using magnetron sputtering equipment, when the vacuum degree reaches 3×10 -3 When the Pa is below, pass in the working gas, pre-sputter at low power for 10-15 minutes, adjust to the working power, stabilize for 5-10 minutes, open the baffle between the target and the sample stage, and start coating; use gap test Coating, the temperature is controlled below 150°C; the film thickness is controlled...

Embodiment 1

[0039] A kind of preparation method of the chalcogenide glass that one embodiment of the present invention proposes is coated with infrared diamond-like protective film on the surface, select IG6(As 40 Se 60 ) glass is a chalcogenide glass substrate, wipe it with a dust-free cloth dripped with alcohol and ether mixture: the chalcogenide glass substrate is a flat sheet with a size of The transmittance of the chalcogenide glass substrate at 1 μm-11 μm is ≥ 61%, and the density of the above chalcogenide glass substrate is 4.63 g·cm -3 , Glass transition temperature 185±5℃.

[0040] Place the chalcogenide glass substrate on the sample stage of the magnetron sputtering equipment, close the baffle between the sample stage and the target, and pump the vacuum chamber pressure to 3×10 -3 Pa, fill the vacuum chamber with a mixture of high-purity argon and isobutane to 6.5×10 -1 Pa; adjust the RF power to 50W, pre-sputter for 10 minutes, then adjust the RF power to 100W, use interm...

Embodiment 2

[0048] A kind of preparation method that the surface of a kind of embodiment of the present invention proposes is coated with the chalcogenide glass of infrared diamond-like protective film, select IG2 (Ge 28 Sb 12 Se 60 ) glass, the transmission range of which is 0.8-15 μm when the thickness is 4 mm, the transmission rate of 1-12 μm is ≥ 64%, and the transmission rate of 12-14 μm is ≥ 50%.

[0049] The above-mentioned IG2 glass is processed into a spherical lens with a thickness of 1.0mm and an outer diameter of 37.5mm as a chalcogenide glass substrate; the aperture N=3 of the chalcogenide glass substrate, ΔN=0.5; Wipe with a lint-free cloth of ether mixture.

[0050] Place the chalcogenide glass substrate on the sample stage of the magnetron sputtering equipment, close the baffle between the sample stage and the target, and pump the vacuum chamber pressure to 3×10 -3 Pa, fill the vacuum chamber with a mixture of high-purity argon and methane to 7×10 -1 Pa; adjust the RF ...

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Abstract

The invention discloses chalcogenide glass coated with an infrared diamond-like protective film and a preparation method of the chalcogenide glass. The preparation method comprises the following steps: 1) a chalcogenide glass substrate is cleaned and vacuumizing is carried out; and 2) the diamond-like protective film is plated on the chalcogenide glass substrate by employing magnetron sputtering. According to the preparation method, in a diamond-like film protective deposition process, the temperature is controlled below the transition temperature of the chalcogenide glass, no the machining surface of the chalcogenide glass is changed remarkably, no folding or non-filming surface ablation phenomenon happens, no transition layer is required, the film substrate adhesiveness is good, and the plated infrared diamond-like protective film can remarkably improve the transmittance and physical shielding properties of the chalcogenide glass.

Description

technical field [0001] The invention relates to the field of glass deep processing, in particular to a chalcogenide glass coated with an infrared diamond-like protective film on the surface and a preparation method thereof. Background technique [0002] Chalcogenide glass is a special glass material with excellent infrared transmission properties. Compared with crystal infrared materials such as single crystal germanium and polycrystalline zinc selenide, it has the characteristics of low thermal difference coefficient, good optical uniformity, and easy preparation. It is regarded as the core lens material of a new generation of temperature adaptive infrared optical system, which can meet the supporting requirements of high-end infrared imaging systems such as precision guided weapons, warship navigation and vehicle night vision. However, chalcogenide glass itself has low hardness, low strength, and poor ability to withstand complex external environments. Therefore, coating m...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/35
Inventor 伏开虎金扬利邱阳徐博刘永华赵华祖成奎何坤王琪陈玮张瑞
Owner CHINA BUILDING MATERIALS ACAD
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