TiAlSiN coating layer preparation method based on reactive sputtering hysteresis effect
A hysteresis effect, coating technology, applied in coating, sputtering, metal material coating process, etc., can solve the problems of low deposition rate, difficult to control structure, lack of process stability and repeatability, etc. Huge economic and social benefits, low coefficient of friction, guaranteed process stability and reproducibility
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Embodiment 1
[0023] Embodiment 1: see Figure 1 to Figure 6, a TiAlSiN coating preparation method based on reactive sputtering hysteresis effect, characterized in that high-purity Ti and TiAlSi (at%, 30:60:10) alloy targets are selected; argon and nitrogen are used as working gases, and the purity is uniform It is 99.999%; TiAlSiN series coatings are prepared by intermediate frequency magnetron sputtering method, including the following steps:
[0024] a. Workpiece pretreatment: Sandblast and polish the workpiece to remove scale, dirt, corrosion and impurities on the surface of the workpiece, and then ultrasonically clean it in deionized water, acetone, and absolute ethanol in turn, and put it into the coating equipment after drying in a vacuum chamber;
[0025] b. Gas path cleaning: pump the vacuum chamber pressure of the coating equipment to 1.0×10 -3 Below Pa, pass argon and nitrogen into the vacuum chamber of the coating equipment to clean the gas path, and heat the vacuum chamber of...
Embodiment 2
[0031] Example 2: see Figure 1 to Figure 6 , a TiAlSiN coating preparation method based on reactive sputtering hysteresis effect, using high-purity Ti and TiAlSi (at%, 30:60:10) alloy targets; argon and nitrogen as working gases, both with a purity of 99.999%; The preparation of TiAlSiN series coatings by intermediate frequency magnetron sputtering method includes the following steps:
[0032] a. Workpiece pretreatment: Sandblast and polish the high-speed steel workpiece (substrate grade M2) to remove scale, dirt, corrosion and impurities on the surface of the workpiece, and then ultrasonically clean it in deionized water, acetone, and absolute ethanol in sequence , put it into the vacuum chamber of the coating equipment after drying;
[0033] b. Gas path cleaning: pump the vacuum chamber pressure of the coating equipment to 1.0×10 -3 Below Pa, pass argon and nitrogen gas into the vacuum chamber of the coating equipment to clean the gas path, and heat the temperature of the...
Embodiment 3
[0045] Embodiment 3: see Figure 1 to Figure 6 , TiAlSiN coating was prepared on cemented carbide tools by intermediate frequency magnetron sputtering method, high-purity Ti and TiAlSi (at%, 30:60:10) alloy targets were selected, argon and nitrogen were used as working gases, and the purity was 99.999%, the preparation method comprises the following steps:
[0046] a. Workpiece pretreatment: The cemented carbide tool (substrate grade YG8N) is subjected to sandblasting pretreatment to remove scale, dirt, corrosion and impurities on the surface of the workpiece, and then ultrasonically cleaned in deionized water, acetone, and absolute ethanol Clean, dry and put it into the vacuum chamber of the coating equipment;
[0047] b. Gas path cleaning: pump the vacuum chamber pressure of the coating equipment to 1.0×10 -3 Below Pa, pass argon and nitrogen into the vacuum chamber of the coating equipment to clean the gas path, and heat the vacuum chamber of the coating equipment to 500°...
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