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Gradient transition layer for metal-based thin film sensor and preparation method thereof

A thin-film sensor and transition layer technology, which is applied in metal material coating process, coating, vacuum evaporation plating, etc., can solve problems affecting service life, cracks and cracks, etc., to avoid excessive oxidation, release internal stress, avoid The effect of micro-cracks or even cracking and falling off

Active Publication Date: 2020-01-14
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This leads to the fact that the substrate is affected by thermal shock and thermal fatigue in practical applications, and cracks and cracks are extremely prone to occur, which affects its service life

Method used

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  • Gradient transition layer for metal-based thin film sensor and preparation method thereof
  • Gradient transition layer for metal-based thin film sensor and preparation method thereof
  • Gradient transition layer for metal-based thin film sensor and preparation method thereof

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preparation example Construction

[0026] The invention provides a gradient transition layer for a metal-based film sensor, such as figure 2 As shown, it includes a three-layer structure, from bottom to top are NiCrAlY alloy layer, NiCrAlY alloy and Al 2 o 3 Gradient layer, Al 2 o 3 layer; thin-film sensors based on this graded transition layer include a five-layer structure, such as image 3 As shown, from bottom to top are nickel base alloy substrate 1, gradient transition layer 2, Al 2 o 3 Ceramic insulating layer 3, sensitive functional layer 4 and Al 2 o 3 protective layer5. The preparation method of this film sensor comprises the following steps:

[0027] Step 1. Surface treatment of the Ni-based alloy substrate: first, polish the surface of the alloy substrate, then use industrial degreaser, acetone, alcohol and deionized water to ultrasonically clean the alloy substrate successively, dry it with a nitrogen gun, and place it in an oven Dry in medium, and use plasma to clean the substrate before ...

Embodiment

[0037] In this embodiment, the nickel-based alloy plate is used as the alloy substrate to be tested, and the process of preparing the gradient transition layer of the present invention thereon includes the following steps:

[0038] Step 1. Preparation of NiCrAlY alloy layer: Put the polished and cleaned nickel-based alloy substrate on the back and the vacuum degree is 8.0×10 -4 In a vacuum environment of Pa, argon gas with a purity of 99.999% (volume percentage) is introduced as the sputtering medium, and NiCrAlY alloy is used as the target material, at a sputtering pressure of 0.4Pa, a sputtering power of 200W, and a substrate temperature of 500°C Under the condition of , the NiCrAlY alloy was deposited on the cleaned nickel-based alloy substrate by DC sputtering method, and the thickness of the deposited film was 10 μm;

[0039] Step 2. NiCrAlY Alloy and Al 2 o 3 Preparation of the gradient layer: After the NiCrAlY alloy layer with a thickness of 10 μm is prepared in step ...

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Abstract

The invention discloses a gradient transition layer for a metal-based thin film sensor and a preparation method thereof, belonging to the technical field of thin film sensors. Including three-layer structure, from bottom to top are NiCrAlY alloy layer, NiCrAlY alloy and Al 2 o 3 Gradient layer, Al 2 o 3 layer, where the NiCrAlY alloy and Al 2 o 3 In the gradient layer, the concentration of NiCrAlY alloy decreases along the film growth direction, and the Al 2 o 3 The concentration increases along the film growth direction. Compared with the existing transition layer, the gradient transition layer of the present invention reduces the heat treatment temperature by 200-400°C and shortens the heat treatment time by more than 50%. The rate and degree of diffusion; at the same time, the heat treatment atmosphere of the present invention has changed from a traditional oxygen-enriched environment to an atmospheric environment, which to a certain extent avoids excessive oxidation of elements in the nickel-based alloy.

Description

technical field [0001] The invention belongs to the technical field of thin-film sensors, in particular to thin-film sensors for testing surface state parameters of hot-end parts such as aero-engines. Accurate testing of parameters provides technical support for the design and optimization of aero-engines; it specifically relates to a gradient transition layer used between a metal base and a thin-film sensor and a preparation method. Background technique [0002] As the "heart" of aero-vehicles, aero-engines provide vital power for the development of aero-vehicles. Since the turbine blades and combustion chamber are in harsh environments such as high temperature, high pressure, and high air flow when the aero-engine is working, the temperature distribution and strain on its surface have a great impact on the performance and life of the aero-engine. Therefore, in the design and experimental research of modern aeroengines, it is very important to accurately measure performanc...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/34C23C14/16C23C14/08C23C14/58
Inventor 赵晓辉刘子良刘洋蒋洪川张万里
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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