This invention discloses sol-gel preparation method of yttrium barium copper oxygen superconducting film. The materials are acetic yttrium, acetic barium, acetic copper, their mol ratio is that acetic yttrium 1 part, acetic barium 2 parts, acetic copper 3-4 parts, trifluoroacetic acid 4-10 parts, water 20-160 parts, acrylic acid 6-40, diethylene triamine 1-5, methanol 60-240, benzoyl acetone 1-10. Fluorine content of the sol is low, components are easy to adjust, chemical stability is good, and preparation process is simple. High temperature superconductive film made by this sol is easy to get superconductive thickness film, its technique repeatability is high, this method can be used to make large area yttrium barium copper oxygen film, the film porosity is low, surface purify is good, and good superconducting characteristic.