Laser preparation method of copper-based flexible wearable pressure sensor
A pressure sensor and flexible-based technology, applied in the field of laser micro-nano manufacturing, to achieve the effects of increasing processing accuracy, improving electrical conductivity and stability, and simplifying the manufacturing process
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Embodiment 1
[0035] 1) Mix copper nitrate trihydrate, ethylene glycol, and water in a mass ratio of 10:10:1 and stir until the copper nitrate is completely dissolved;
[0036] 2) Stir and heat the solution to 100°C and keep it warm for 10 minutes at a stirring rate of 300 rpm. This process needs to be carried out in a ventilated environment;
[0037] 3) After that, the solution was naturally cooled to room temperature, and formic acid was added dropwise and stirred, wherein the volume ratio of formic acid to ethylene glycol was 100:1;
[0038] 4) Ultrasound the solution for 30 minutes at an ultrasonic frequency of 20 kHz, and stir evenly;
[0039] 5) Spin-coat the solution on the glass substrate at a spin-coating speed of 1000 rpm;
[0040] 6) Scan the copper nitrate ethylene glycol film with a semiconductor laser in the 808 nm band, and focus with a 10x objective lens. The laser power before focusing is 3W, and the scanning speed is 5 mm / s;
[0041] 7) excess copper nitrate ethylene gly...
Embodiment 2
[0045] The present embodiment is different from Example 1 in that: copper nitrate trihydrate, ethylene dihydrate described in step 1)
[0046] Alcohol and water are in a mass ratio of 15:10:1. Others are the same as in Example 1.
Embodiment 3
[0048] The difference between this embodiment and Example 1 or 2 is that the volume ratio of formic acid to ethylene glycol in step 3) is 20:1. Others are identical with embodiment 1 or 2.
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