Method for preparing high-quality bismuth ferrite ferroelectric photovoltaic films by magnetron sputtering

Abstract

The invention provides a method for preparing high-quality bismuth ferrite (BFO) ferroelectric photovoltaic films. The method comprises the specific steps of adopting BFO ceramic targets mixed with lanthanide, placing a cleaned FTO / glass substrate into a vacuum chamber, and adjusting the distance between a sample stage and a target stage to be 50-150 mm; introducing O2 and Ar according to the gasflow ratio O2 / Ar of 1 / 10-1 / 4 when the background vacuum degree is higher than 8x10<-4> Pa, making the working pressure reach 1-10 Pa, setting the power of a radio frequency power supply to be 10-100 W, the rotation speed of the sample stage to be 5-15 rpm, and the pre-sputtering time to be 5-15 min separately, and setting the sputtering time according to the thickness of the BFO film; and continuously introducing Ar insert protective gas upon completion of sputtering for in-situ annealing treatment to the BFO film, wherein the heating temperature is 300-600 DEG C, and the holding time is 30-180 min. The method provided by the invention is a physical vapor deposition method, and the BFO ferroelectric photovoltaic films are prepared by a conventional magnetron sputtering system, and are highin technological controllability and applicability, and easy to produce on a large scale; and a new way is opened up for development of solar cells based on the BFO ferroelectric photovoltaic films.

Description

technical field [0001] The invention relates to a method for preparing a bismuth ferrite ferroelectric photovoltaic thin film by using a magnetron sputtering coating system. The method adopts magnetron sputtering deposition, which is a physical vapor deposition method, to prepare a bismuth ferrite ferroelectric thin film with dense and smooth surface, good crystallization performance and obvious photovoltaic effect, belonging to the field of photovoltaic materials and technology. Background technique [0002] In recent years, with the increasingly serious energy crisis and environmental deterioration, the development of renewable green energy has become a common concern of the whole society. In order to realize the economical and large-scale application of solar power generation, it is imminent to explore and develop low-cost, high-efficiency solar cells. Recently, the photovoltaic effect of ferroelectric materials has stimulated research interest. In ferroelectrics, the e...

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Problems solved by technology

In order to realize the solar cell application of BFO ferroelectric thin film, the premise is to prepare high-quality BFO thin film. Usually, pulsed laser deposition or other epitaxial growth methods are used. There are problems such as high equipment requirements and low efficiency, and it is not convenient to produce BFO ferroelectric thin film. Electrode thin films are used in other solar cell (such as silicon-based, CdTe, CuInGaSe, etc.) technologies

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