Method for improving binding force and tribological property of fullerene-like thin film

A fullerene-like, binding force technology, applied in the direction of gaseous chemical plating, metal material coating process, coating, etc., can solve the problem of high friction coefficient of fullerene-like films, complicated process, and ineffective improvement of binding force, etc. problems, achieve good chemical inertness, simple process, and improve tribological properties

Inactive Publication Date: 2018-06-12
LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, scientists and industry people from various countries have tried to increase the bonding force between the carbon film and the steel substrate by adding a gradient transition layer (patent ZL200910098622.1), but this method is complicated in process and has no obvious effect on improving the bonding force
In addition, the deposited fullerene-like film has a high coefficient of friction (patent ZL 200710308591.9)

Method used

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  • Method for improving binding force and tribological property of fullerene-like thin film
  • Method for improving binding force and tribological property of fullerene-like thin film

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0027] First, select three stainless steel sheets with a smooth surface, pre-clean them with dilute hydrochloric acid solution, wait for them to dry, then put them into acetone and ethanol for ultrasonic cleaning for 30 minutes each, take out the stainless steel sheets, dry them with ear washing balls, and then quickly transfer them to On the base of the vacuum chamber, start vacuuming. Secondly, wait for the vacuum to be less than 1.0×10 -3 At Pa, argon gas (150 SCCM) was introduced, and the pressure was adjusted to about 25 Pa. Under the condition of pulse bias of -600 V and duty cycle of 50%, plasma cleaning was performed for 30 minutes. After the cleaning is completed, a mixture of nitrogen (30 SCCM), phosphine (10 SCCM) and methane (10 SCCM) is introduced, and the pressure is adjusted to about 35 Pa. The fullerene-like thin film was deposited at low temperature under the condition of 2 hours.

Embodiment 2

[0029] First, two silicon wafers with smooth surfaces are selected, one of which is deposited on the surface of a fullerene-like film co-doped with N and P elements, and the other is deposited on the surface of a fullerene-like film not doped with N and P elements. Then the friction test was carried out on the two silicon substrates with carbon film deposited on the surface. The test conditions are: dual ball 6 mm steel ball, load 10 N, frequency 3 Hz, amplitude 5 mm, time 1 hour. as figure 1 As shown, the average friction coefficient of the fullerene-like film co-doped with N and P elements is 0.012, while the average friction coefficient of the fullerene-like film without N and P elements is 0.021. The experiment was repeated three times to ensure the accuracy of the experimental results. It shows that the fullerene-like film co-doped with N and P elements can greatly reduce the friction force, and the friction force drops by about 43%.

Embodiment 3

[0031] First, two stainless steel sheets with smooth surfaces are selected, one of which is deposited on the surface of a fullerene-like film co-doped with N and P elements, and the other is deposited on the surface of a fullerene-like film not doped with N and P elements. Then the scratch test was carried out on the two silicon substrates with carbon film deposited on the surface. as figure 2 As shown, the binding force of the fullerene-like film co-doped with N and P elements is 40 N, while the binding force of the fullerene-like film without N and P elements is 10 N. Repeat the experiment three times to ensure the accuracy of the experimental results. It shows that the fullerene-like film co-doped with N and P elements can improve the binding force between the substrate and the fullerene-like film, and the binding force can be increased by 300%.

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Abstract

The invention discloses a method for improving the binding force and the tribological property of a fullerene-like thin film. According to the method, by means of a plasma enhanced chemical vapor deposition technology, nitrogen, phosphine and methane are used as a gas source, and fullerene-like thin film is deposited on a substrate under the joint effects of a radio frequency power source and pulse negative bias. The method is characterized in that the process is simple, economic and efficient, the deposition temperature is low, repeatability is good, the friction coefficient is extremely low,and the improvement effect of the binding force of the steel substrate and the fullerene-like thin film is obvious. By adopting the method, the binding force and the tribological property of the fullerene-like thin film can be substantially improved, and the fullerene-like thin film is made to play the lubricating effect better. The method is applicable to the stainless steel surface and is alsoapplicable to the fields of ceramics, high polymer materials, composite materials and other materials, and has broad application prospects. Thus, the method for improving the binding force and the tribological property is huge in application potential.

Description

technical field [0001] The invention belongs to the field of plasma-enhanced chemical vapor deposition, and relates to a method for improving the binding force and tribological performance of a fullerene-like film. Background technique [0002] With the development of high precision, high integration, high energy efficiency, and high reliability of mechanical systems, the surface effects and interface effects of moving parts of mechanical systems are becoming more and more prominent, and the requirements for the control of friction and wear performance are becoming more and more stringent. The loss caused by friction and wear in developed countries accounts for about 5%-7% of the gross national product (GDP) every year. my country is a big manufacturing country, and its loss ratio is higher. According to incomplete statistics, the economic loss caused by friction and wear in my country reaches trillions of yuan every year. Compared with industrially developed countries, my...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/26C23C16/517
CPCC23C16/26C23C16/517
Inventor 张俊彦王彦王永富高凯雄
Owner LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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