Rare earth yttrium doped molybdenum disulfide self-lubricating composite coating and preparation method thereof

A composite coating, molybdenum disulfide technology, used in coatings, metal material coating processes, gaseous chemical plating, etc., can solve problems such as poor coating quality and equipment susceptible to corrosion

Active Publication Date: 2018-06-12
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, MoS 2 Self-lubricating coatings are rarely prepared using CVD processes
In this small amount of CVD-MoS 2 In the study of self-lubricating coatings, some researchers use Mo halides such as MoF 6 、MoCl 5 Etc and H 2 S is used as a precursor, causing the equipment to be easily corroded; in addition, individual researchers use molybdenum carbonate (Mo(CO) 6 ), Mo-containing organic matter (Mo(S-t-Bu) 4 ) etc. and H 2 S as the precursor, the coating quality is very poor

Method used

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  • Rare earth yttrium doped molybdenum disulfide self-lubricating composite coating and preparation method thereof
  • Rare earth yttrium doped molybdenum disulfide self-lubricating composite coating and preparation method thereof
  • Rare earth yttrium doped molybdenum disulfide self-lubricating composite coating and preparation method thereof

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preparation example Construction

[0066] The invention provides a high-performance CVD-MoS with weak corrosion to equipment 2 A method for preparing a self-lubricating composite coating, the steps of the method are as follows:

[0067] (1) In order to prevent by-products from corroding equipment and improve the quality of the coating, the present invention uses molybdenum trioxide (MoO 3 ) powder and sulfur (S) powder as precursors;

[0068] (2) with Ar and H 2 As a carrier gas and shielding gas;

[0069] (3) Through yttrium chloride hexahydrate (YCl 3 ·6H 2 O) The rare earth element yttrium is introduced into the coating, which greatly improves the MoS 2 Coating structure.

[0070] At the same time, the molybdenum trioxide powder in the present invention is analytically pure, with an average particle size of ≤10 μm and a purity of 99.5%.

[0071] The sulfur powder is analytically pure sublimated sulfur with a purity of 99.95%.

[0072] The yttrium chloride hexahydrate (YCl 3 ·6H 2 O) is analytically...

Embodiment 1

[0085] First weigh 30mg of MoO with a purity of 99.5% 3 Powder and 10 mg of YCl with a purity of 99.99% 3 ·6H 2The O powder is placed side by side on one end of the ceramic boat, and the 304 stainless steel substrate with a titanium nitride (TiN) coating is placed on the other end of the ceramic boat, with a distance of 7 cm between the two. This ceramic boat is placed in the high temperature zone of the tube furnace; Put 1.2g of sulfur powder with a purity of 99.95% into another ceramic boat, and place it in the low temperature area where the heating belt is wound. Then the tube furnace was sealed and evacuated, and then high-purity argon gas was introduced. After doing this twice, the tube furnace starts to heat up. Heating the molybdenum source substrate area to 200°C in 10 minutes, flushing with high-purity argon gas to keep the pressure for 10 minutes, vacuuming for 30 minutes, then raising the temperature to 770°C at a rate of 20°C / min. At this point, the heating bel...

Embodiment 2

[0088] First weigh 60 mg of MoO with a purity of 99.5% 3 The powder is placed on one end of the ceramic boat, and the 304 stainless steel substrate with a titanium nitride (TiN) coating is placed on the other end of the ceramic boat, with a distance of 7cm between the two. The ceramic boat is placed in the high temperature zone of the tube furnace; 99.95% sulfur powder is put into another ceramic boat, put it in the low temperature area where the heating belt is wound. Then the tube furnace was sealed and evacuated, and then high-purity argon gas was introduced. After doing this twice, the tube furnace starts to heat up. Heating the molybdenum source substrate area to 200°C in 10 minutes, flushing with high-purity argon gas to keep the pressure for 10 minutes, vacuuming for 30 minutes, then raising the temperature to 770°C at a rate of 20°C / min. At this point, the heating belt starts to heat the sulfur powder to 130°C until it melts. The tube furnace continued to heat up to...

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Abstract

The invention provides a rare earth yttrium doped molybdenum disulfide self-lubricating composite coating and a preparation method thereof. Specifically, the molybdenum disulfide self-lubricating composite coating is doped with rare earth yttrium, wherein the molar content of yttrium in the composite coating is 0.1%-5% according to the total molar content of the composite coating. According to themolybdenum disulfide self-lubricating composite coating, sublimed sulfur, yttrium chloride hexahydrate and molybdenum trioxide are adopted as raw materials, and the rare earth yttrium doped molybdenum disulfide self-lubricating composite coating is prepared through the chemical vapor deposition method. The molybdenum disulfide self-lubricating composite coating has good wear resistance and self-lubrication and excellent winding plating property. Coating deposition can be conducted on large-size complex workpieces of a complex shape.

Description

technical field [0001] The invention relates to the field of solid lubricating materials, in particular to a rare earth yttrium-doped molybdenum disulfide self-lubricating coating and a preparation method thereof. The molybdenum disulfide self-lubricating coating can be used to reduce friction and wear in micromechanical electronic systems and aerospace industries, and improve their performance and service life. Background technique [0002] Molybdenum disulfide (MoS 2 ) As an excellent solid lubricant, it has high application value in the field of supersolid lubrication, especially in reducing friction and wear in micromechanical electronic systems and aerospace industry, improving its performance and life, based on MoS 2 The advanced super solid lubrication technology has a strong application space. [0003] Due to its graphite-like laminated structure, MoS 2 As a self-lubricating solid lubricant, it is widely used in high temperature and vacuum environments. Correspon...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/30
CPCC23C16/305
Inventor 易剑李明磊王少龙褚伍波马洪兵江南
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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