Cantilever beam based direct heating microwave radiation device of micro nano electromechanical system

Abstract

The invention relates to a cantilever beam based direct heating microwave radiometer of a micro nano electromechanical system. The radiometer is composed of a microwave antenna, a low noise amplifier,a six-port cantilever beam coupler, a microwave frequency and power detection module, an amplifier, a single-chip microcomputer and an LCD; a signal received by the microwave antenna is amplified andthen input to the six-port cantilever beam coupler, a coupled signal is used for power and frequency detection, amplified by the amplifier and then operated by the single-chip microcomputer, and thefrequency and power of the radiation signal are displayed in the LCD. The radiation frequency and intensity of the radiation signal can be obtained at the same time, a direct heating type vertical nano microwave power sensor instead of a traditional diode serves as a microwave power sensor, the radiometer has the advantages of high linearity, low temperature shift and high upper power limit, the thermal conductivity of a polycrystalline silicon nano wire is much lower than that of a traditional body material, the thermal to electric conversion efficiency is improved, the output voltage is increased greatly, and the sensitivity and precision of the radiometer are improved.

Description

Technical field [0001] The invention proposes a cantilever-based micro-nano electromechanical system direct heating microwave radiometer, which belongs to the technical field of microelectromechanical systems. Background technique [0002] Microwave radiometer is an instrument that uses microwave technology for remote sensing and is a passive component. A general microwave radiator uses a microwave antenna to receive the radiation signal, and then uses the circuit structure of a mixer and a diode detector to obtain the power of the microwave radiation signal. The use of diodes as detectors has many problems, such as severe temperature drift, low power detection upper limit and non-linear characteristics, unable to measure the frequency parameters of the radiated power signal, and its accuracy needs to be further improved under harsh environmental conditions. The direct heating vertical nano-microwave power sensor is based on polysilicon nanowires, and its thermal conductivity is...

AI Technical Summary

Problems solved by technology

The use of diodes as detection devices has many problems, such as severe temperature drift, low upper limit of power detection and nonlinear characteristics, and the inability to measure the frequency parameters of radiation power signals. Under harsh environmental conditions, its accuracy needs to be further improved.

Images