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TiAlN/W2N multi-layer coating with high hardness and high corrosion resistance and preparation method thereof

A multi-layer coating and high hardness technology, which is applied in the coating, metal material coating process, superimposed layer plating, etc., can solve the problems of harsh service environment and the performance of TiN hard coating can not meet the industrial needs, etc. Achieve the effect of simple operation, beneficial to industrial application, and fine grain size

Active Publication Date: 2018-09-11
SOUTH CHINA UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the increasingly harsh service environment has made the performance of TiN hard coatings unable to meet industrial needs, and the development of multi-layer and multi-layer coatings has become a key direction for obtaining high-performance coatings.

Method used

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  • TiAlN/W2N multi-layer coating with high hardness and high corrosion resistance and preparation method thereof
  • TiAlN/W2N multi-layer coating with high hardness and high corrosion resistance and preparation method thereof
  • TiAlN/W2N multi-layer coating with high hardness and high corrosion resistance and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0041] The TiAlN / W of this embodiment 2 The specific preparation method of N multi-layer coating is as follows:

[0042] Clean the ground and polished stainless steel substrate with analytical pure absolute ethanol and acetone in ultrasonic waves, check whether the surface of the substrate is clean after drying, and install it on the turntable of the vacuum chamber after confirming that the surface of the substrate is free of pollution. Close the door of the vacuum chamber for vacuuming. Air pressure reaches 1.0×10 -3 After Pa, pass argon gas into the vacuum chamber to maintain the pressure at 0.5 Pa, the flow rate of argon gas is 70 sccm, and at the same time adjust the substrate DC bias voltage to 180V, the pulse bias voltage to 800V, and the duty cycle to 80%, and turn on the Hall ion source , Glow cleaning the substrate for 30min. After the glow cleaning, the Hall ion source was turned off, nitrogen gas was introduced into the vacuum chamber, the air pressure was mainta...

Embodiment 2

[0045] The TiAlN / W of this embodiment 2 The specific preparation method of N multi-layer coating is as follows:

[0046] Clean the ground and polished cemented carbide substrate with analytical pure absolute ethanol and acetone in ultrasonic waves, check whether the surface of the substrate is clean after drying, and install it on the turntable in the vacuum chamber after confirming that the surface of the substrate is free of pollution , close the door of the vacuum chamber, and carry out vacuuming operation. Air pressure reaches 1.0×10 -3 After Pa, pass argon gas into the vacuum chamber to maintain the pressure at 0.5 Pa, the flow rate of argon gas is 70 sccm, and at the same time adjust the substrate DC bias voltage to 180V, the pulse bias voltage to 800V, and the duty cycle to 80%, and turn on the Hall ion source , Glow cleaning the substrate for 30min. After the glow cleaning, the Hall ion source was turned off, nitrogen gas was introduced into the vacuum chamber, the ...

Embodiment 3

[0049] The TiAlN / W of this embodiment 2 The specific preparation method of N multi-layer coating is as follows:

[0050] Clean the ground and polished stainless steel substrate with analytical pure absolute ethanol and acetone in ultrasonic waves, check whether the surface of the substrate is clean after drying, and install it on the turntable of the vacuum chamber after confirming that the surface of the substrate is free of pollution. Close the door of the vacuum chamber for vacuuming. Air pressure reaches 1.0×10 -3 After Pa, pass argon gas into the vacuum chamber to maintain the pressure at 0.5 Pa, the flow rate of argon gas is 70 sccm, and at the same time adjust the substrate DC bias voltage to 180V, the pulse bias voltage to 800V, and the duty cycle to 80%, and turn on the Hall ion source , Glow cleaning the substrate for 30min. After the glow cleaning, the Hall ion source was turned off, nitrogen gas was introduced into the vacuum chamber, the air pressure was mainta...

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Abstract

The invention discloses a TiAlN / W2N multi-layer coating with high hardness and high corrosion resistance and a preparation method thereof. The TiAlN / W2N multi-layer coating is characterized in that amode of successive sputtering of multiple targets is utilized to deposit a TiN transition layer and alternatively sputtering and depositing TiAlN layers and W2N layers on a matrix, the two layers close to the matrix are the TiN transition layer and the TiAlN layer in sequence, and the uppermost layer is the W2N layer. The total thickness of the TiAlN / W2N multi-layer coating is 2.5-3.5mu m, the thickness of each TiAlN layer is 50-210nm, the thickness of each W2N coating is 40-160nm, and the total number of periodic layers is 10-50. The preparation method comprises the steps of: cleaning the matrix, depositing the TiN transition layer and alternatively sputtering and depositing the TiAlN layer and the W2N layer. The TiAlN / W2N multi-layer coating is high in hardness and good in wear resistance, the thickness of single layer is easy in control and large in controllable range, and the process is simple.

Description

technical field [0001] The invention relates to the field of hard protective coatings, in particular to a TiAlN / W with high hardness and high wear resistance 2 N Multilayer coatings and methods for their preparation. Background technique [0002] With the continuous development of society and technology, people's demand for materials is increasing, and their performance requirements are also getting higher and higher. In the field of cutting processing, strengthening the tool surface is also the current development trend. Coating a layer of hard coating on the tool surface is one of the means to strengthen the tool, which can improve the hardness, wear resistance and corrosion resistance of the tool surface. , Reduce the wear of the tool surface and greatly increase the service life of the tool. As the first generation of hard coating, TiN has been extensively studied and widely used in industrial production. However, the increasingly harsh service environment has made th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/02C23C14/06C23C14/32C23C14/35C23C28/04
CPCC23C14/0036C23C14/022C23C14/024C23C14/0641C23C14/325C23C14/352C23C28/044C23C28/40
Inventor 苏峰华徐星
Owner SOUTH CHINA UNIV OF TECH
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