Batch preparation method of hfcvd for diamond-coated tools with complex shapes

A complex shape, diamond film technology, applied in metal material coating process, coating, gaseous chemical plating and other directions, can solve the difficulty, affect the appearance quality of complex shape diamond film coating tools, and the temperature field distribution on the surface of the tool substrate is not enough. Uniformity and other issues to achieve the effect of ensuring uniform deposition
CN108559970BActive Publication Date: 2019-11-01SHANGHAI JIAO TONG UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SHANGHAI JIAO TONG UNIV
Publication Date
2019-11-01

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Abstract

The invention discloses an HFCVD batch preparation method of a complex-shaped diamond film coated cutter. A handle of the complex-shaped cutter after being pretreated is inserted into a cutter coolingbase to be placed on the water-cooled workbench of HFCVD equipment. The cutter cooling base is formed by optimally matching a molybdenum sheet layer, a graphitic layer, a red copper layer or a stainless steel layer, and a drill hole matched with the handle in diameter and length is formed in the cutter cooling base. The HFCVD equipment adopts a single-layer hot filament. In the cutter mounting and film growing processes, the HFCVD equipment can realize free lifting of the cutter cooling base by controlling the lifting of the water-cooled workbench. Hydrogen, a carbon source and a doped sourceenter into the surface of the complex-shaped cutter to deposit a single-layer or composite diamond film. The HFCVD batch preparation method can conveniently and effectively control the temperature value of the blade area of the cutter, ensures the uniform distribution of a temperature field and a density field of a reactive group, ensures the uniform deposition of the diamond film, and avoids ofdepositing carbon impurities on the handle position to cause the phenomenon of a black bar.
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Description

technical field

[0001] The invention relates to a method in the technical field of mechanical processing, in particular to a HFCVD batch preparation method for complex-shaped diamond film-coated tools. Background technique

[0002] With the development of workpiece materials in the direction of lightweight and composite, high-silicon aluminum (lead) alloys, metal (ceramic) matrix composites, ceramics, carbon and graphite composites, other fiber-reinforced composites, laminate flooring and other difficult-to-process materials Used extensively in industries such as automotive, aerospace and tooling. Integral rotary tools mainly made of cemented carbide materials, such as twist drills, end mills and other complex-shaped tools, are widely used, and these tools wear seriously when processing the above-mentioned difficult-to-machine materials at high speeds, and the machining accuracy and surface quality Difficult to guarantee.

[0003] Chemical vapor deposition (Chemical Vapor ...

Claims

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