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A water-dissolution-assisted precise and efficient cutting method for deliquescent optical crystals

A technology of optical crystals and cutting methods, which is applied in the fields of fine working devices, semiconductor/solid-state device manufacturing, electrical components, etc., can solve the problems of low cutting accuracy and efficiency, reduced surface quality, brittle collapse and damage, etc., to shorten the installation. Preparation time, improved surface quality, reduced damage effects

Active Publication Date: 2020-02-18
DALIAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the above-mentioned invention can only feed and angle-relocate the workpiece through manual adjustment or simple mechanical feeding, which requires high labor and long preparation time, resulting in low cutting accuracy and efficiency; meanwhile, the above-mentioned invention is still in mechanism. Simply processing through the friction removal effect between the wire saw and the crystal material is prone to brittle fracture, causing surface damage, reducing the surface quality after cutting, and improving the processing efficiency by modifying the equipment rather than the cutting mechanism has great constraints sex

Method used

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  • A water-dissolution-assisted precise and efficient cutting method for deliquescent optical crystals
  • A water-dissolution-assisted precise and efficient cutting method for deliquescent optical crystals
  • A water-dissolution-assisted precise and efficient cutting method for deliquescent optical crystals

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Effect test

Embodiment 1

[0069] According to the cutting fluid formulation in the present invention, the cutting fluid 10 with a water content of 10% (45% organic base carrier liquid, 40% dispersant, 5% dispersant additive, 10% pure water) was prepared according to Figure 5 In the high-efficiency working area, the cutting line speed is 3m / s, the feed speed is 1mm / min, and the diameter of 0.26mm saw wire 16 pairs of KDP crystal 1 are selected for cutting test. Compared with liquid, the efficiency increased by 16%.

Embodiment 2

[0071] Prepare cutting fluid 10 with a water content of 25% (organic carrier liquid 30%, dispersant 35%, dispersant additive 10%, pure water 25%), according to Figure 5 In the high-efficiency working area, the cutting line speed is 6m / s, the feed speed is 3mm / min, and the diameter of 0.26mm saw wire 16 pairs of KDP crystal 1 are selected for cutting test. Compared with liquid, the efficiency increased by 22%.

[0072] The surface morphology of KDP crystal 1 after cutting with 10% water content cutting fluid 10 is as follows Image 6 As shown, the surface obtained under the same conditions as the traditional red oil cutting fluid ( Figure 7 ) compared with , the surface chipping and plowing are significantly reduced and become smoother; use ZYGO white light interferometer to detect the surface processed by 10% water content cutting fluid and red oil cutting fluid, such as Figure 8 with Figure 9 As shown, the surface quality has been significantly improved, and the roughn...

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Abstract

The invention discloses a water dissolving auxiliary precise efficient cutting method for easy-deliquesced optical crystals. The method comprises the following steps that KDP crystals are placed on aworkpiece placing platform of a precise efficient cutting machine tool; an embedded lifting numerical control pulsation feeding mechanism and an embedded lifting numerical control rotating mechanism are arranged on the workpiece placing platform; workpieces are precisely oriented and positioned through an orienter and a numerical control system; a diamond wire saw is aligned to a cutting positionfor cutting; the diamond wire saw in the cutting position is kept dipping in cutting liquid; and the cutting liquid is multi-phase water-in-oil micro emulsion. The numerical control system of the precise efficient cutting machine tool is adopted to control feeding and rotation of the workpieces, so that the feeding and rotating precision of the workpieces is guaranteed, and the cutting precision is improved; and the method uses the physical property of the easy-deliquesced optical crystals dissolved in water for cutting, reduces the damage caused by mechanical hard cutting, improves the cut surface roughness, improves the surface quality, and improves the cutting efficiency.

Description

technical field [0001] The invention belongs to the field of precision cutting of deliquescent crystals, in particular to a water-dissolution-assisted precise and high-efficiency cutting method of deliquescent optical crystals. Background technique [0002] Potassium dihydrogen phosphate (KDP) crystal is an excellent optical crystal material. Due to its excellent nonlinear electro-optic properties, it is widely used in the research of inertial confinement fusion (ICF) as electro-optic switch and frequency-doubling conversion element. Hundreds of large-size (410mm×410mm×10mm), ultra-high-quality (nanoscale surface roughness) KDP crystal components are required in the ICF project, which imposes extremely stringent requirements on the growth and processing of KDP crystals. However, KDP crystal is a soft, brittle, deliquescent and strongly anisotropic artificial crystal material. It is a typical research problem recognized by researchers around the world. After cutting, it is d...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/67B28D5/04B28D7/00
CPCB28D5/042B28D7/00
Inventor 高航陈玉川周天一鲍永杰
Owner DALIAN UNIV OF TECH