Preparation method of patterned metal film

Abstract

The invention discloses a preparation method of a patterned metal film. The preparation method comprises the following steps: (1) plating the surface of a silicon substrate with a layer of metal filmby using a vacuum evaporation technology; (2) spin-coating the surface of the metal film with a layer of UV adhesive; (3) curing the UV adhesive by using a lithography technology, and then, removing the uncured UV adhesive by using a developing solution; (4) pouring a prepolymer on the surface of a sample, curing the prepolymer under the condition of negative pressure, and tightly combining the prepolymer with an exposed metal film; and (5) vertically stripping a polymer film from the silicon substrate to transfer a patterned metal silver film from the surface of the silicon substrate to the surface of a PDMS (polydimethylsiloxane) film. By using the preparation method, the controllability of a preparation process can be improved, and the patterning precision can be improved, so that the preparation process is simple and easy; the consumption of a chemical reagent and the generation of chemical wastes are reduced, so that the preparation process is more environment-friendly, and the environment for operation performed by experimental persons is more healthy; and the reagent required by preparation is reduced, so that the cost is reduced.

Description

technical field [0001] The invention relates to the field of strain sensing materials, in particular to a method for preparing a patterned metal thin film. Background technique [0002] Strain sensors are used in many industrial systems, such as touch screens, air pressure monitors for vacuum instruments, and atmospheric pressure monitors for aircraft, all of which require the ability to sense pressure-generating strain and convert it into an electrical signal. Moreover, strain sensors have been extended to wearable electronics and biomedical devices, advancing the development of wearable, biocompatible, and implantable devices. [0003] However, most of these applications use inelastic strain-sensing materials. Even if a high pressure is applied to the surface of this sensing material, the strain of the material is very small and the sensitivity of the sensing system is insufficient. In addition, the use of interlayer stacking adhesive materials makes the strained material...

AI Technical Summary

Problems solved by technology

[0016] (2) The preparation process of the prior art needs to use two wet etching methods, that is, to use alkaline and acidic solutions to etch respectively, which will not only produce more experimental waste liquid, cause environmental pollution, but also improve the preparation of materials. cost

[0017] (3) The wet etching process takes a long time, and the etching time needs to be strictly controlled, so the preparation process is complicated

[0018] (4) Experimenters use chemical reagents for a long time, which is not conducive to the health of experimenters

Images