ScB2-B superhard composite film and preparation method thereof

A composite thin film, scb2-b technology, applied in the direction of ion implantation plating, metal material coating process, coating, etc., can solve the problems of rare preparation processes, achieve the elimination of surface roughness, strong adjustability, and reduce deposition The effect of temperature

Active Publication Date: 2019-01-11
DONGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Using first-principles theory and density functional theory, it was shown that ScB 2 The hardness can reach ~30GPa, but there are few reports on its preparation process and its hardness test data in the literature

Method used

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  • ScB2-B superhard composite film and preparation method thereof
  • ScB2-B superhard composite film and preparation method thereof
  • ScB2-B superhard composite film and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0052] A ScB 2 -B superhard composite film, the chemical formula is 0.78ScB 2 -0.22B superhard composite material composition.

[0053] above ScB 2 -The preparation method of B superhard composite film, process such as figure 1 As shown, the specific steps are as follows:

[0054] Step 1: Substrate Surface Pretreatment

[0055] The substrate is selected as a silicon wafer whose surface is oxidized to silicon dioxide (abbreviated as an oxide wafer), and the substrate is placed in a container containing acetone, ethanol and deionized water in sequence for ultrasonic cleaning and drying to remove organic matter on the surface of the substrate. and particles and other impurities.

[0056] Step 2: Chamber Preheating

[0057] Put the pretreated oxide sheet into the magnetron sputtering apparatus, and vacuum until the vacuum reaches 1.0×10 -3 At Pa, heat the cavity to 400°C.

[0058] Step 3: Surface Cleaning and Etching

[0059] Vacuum first to maintain the vacuum degree in ...

Embodiment 2

[0064] A ScB 2 -B superhard composite film, the chemical formula is 0.65ScB e -0.35B superhard composite material composition.

[0065] above ScB 2 -The preparation method of composite thin film specifically comprises the following steps:

[0066] Step 1: Substrate Surface Pretreatment

[0067] The substrate is selected as a quartz plate, and the substrate is sequentially placed in a container containing acetone, ethanol and deionized water for ultrasonic cleaning and drying to remove impurities such as organic matter and particles on the surface of the substrate.

[0068] Step 2: Chamber Preheating

[0069] Put the pretreated quartz sheet into the magnetron sputtering apparatus, and vacuum until the vacuum reaches 5.0×10 -3 At Pa, heat the cavity to 470°C.

[0070] Step 3: Surface Cleaning and Etching

[0071] Vacuum first to maintain the vacuum degree in the magnetron sputtering apparatus at 5×10 -3 Pa, then feed argon gas into the magnetron sputtering apparatus to m...

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Abstract

The invention discloses an ScB2-B superhard composite film and a preparation method thereof. The ScB2-B superhard composite film is characterized in that the chemical formula of ScB2-B superhard composite film is (1-x)ScB2-xB, wherein x is larger than 0 but smaller than or equal to 0.6. The preparation method of the ScB2-B composite film comprises the steps that impurities on the surface of a substrate are removed; a cavity is preheated; the surface of the substrate is cleaned and etched; magnetron co-sputtering devices targeted Sc and B are adopted to obtain the ScB2-B superhard composite film; by controlling the power of the two targeted positions and the intensity of pressure of the cavity when sputtering, the adjustment of components is achieved; and the composition of different physical properties (modulus, hardness, thermal expansion coefficient and the like) can be obtained to meet different use requirements and usage scenarios. The scandium boride provided by the preparation method has high hardness and is suitable for wide application in many fields such as machining, oil well drilling and aerospace.

Description

technical field [0001] The invention belongs to the technical field of hard materials and their preparation, in particular to a ScB 2 -B Hard Composite Thin Film and Preparation of ScB by Magnetron Sputtering Technology 2 -B method of rigid composite film. Background technique [0002] Hard materials have excellent properties such as high hardness, high melting point and corrosion resistance, and are widely used in many fields such as machining, oil well drilling and aerospace. Traditional superhard materials are represented by diamond, cubic boron nitride (cBN) and boron carbide. [0003] Diamond is recognized as the hardest material (~100GPa), and its preparation often adopts ultra-high temperature and high pressure technology to directly transform carbonaceous raw materials such as graphite from a solid or molten state into diamond. cBN has high chemical stability, and polycrystalline cubic boron nitride (PCBN) is widely used in industry at present. U.S. patent docume...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/06C23C14/02
CPCC23C14/022C23C14/06C23C14/352
Inventor 姜海涛章思帆梁拥成吴良才
Owner DONGHUA UNIV
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