A special device for multi-station long tube high-efficiency magnetron sputtering coating

Abstract

The invention aims to provide a device special for efficient magnetron sputtering preparation of a high-quality metal film on the outer surface of a long pipe. A vacuum chamber communicates with a vacuum generating system and an inflation system, and the vacuum chamber is internally provided with an annular target sputtering system and a re-sputter cleaning system; a servo transmission system is connected with a magnetic coupling transmission system; the magnetic coupling transmission system is provided with an external magnetic ring, a front blocking pipe, a rear blocking pipe, a supporting pipe and a supporting rod, the supporting pipe sleeves the supporting rod, the front blocking pipe and the rear blocking pipe sleeve the supporting pipe, the rear blocking pipe and the supporting pipeare fixed together, the rear blocking pipe and an N pole of the external magnetic ring are fixed together, an S pole magnet is arranged outside the N pole of the external magnetic ring, and the position between the front blocking pipe and the rear blocking pipe is used for fixing the film-coated pipe; the supporting rod penetrates through the vacuum chamber, and a pipe core heating system is arranged on the position, at a film-coated pipe inlet of the vacuum chamber, of the supporting rod; and a power supply system is connected with the vacuum generating system, the inflation system, the annular target sputtering system, the servo transmission system, the pipe core heating system, the re-sputter system and a circulating water cooling system.

Description

technical field [0001] The invention relates to magnetron sputtering coating, and provides a device for efficiently preparing metal films on ultra-long pipes. Background technique [0002] In the society with the rapid development of science and economy, thin film materials, as a kind of functional materials, have received more and more attention. As a form of material, functional film has special properties in light, electricity, magnetism, heat, anti-corrosion, decoration, etc., so it is applied in related fields. Functional thin film materials are divided into: superconducting thin film, conductive thin film, resistive thin film, semiconductor thin film, insulating thin film, passivation and protective thin film, piezoelectric thin film, ferroelectric thin film, photoelectric thin film, magnetoelectric thin film, magneto-optical thin film, etc. . At present, the means of preparing thin films are mainly divided into two categories: physical vapor deposition and chemical ...

AI Technical Summary

Problems solved by technology

Although the method of rotation can be used to coat the film, the diffraction of the plasma still occurs during the film coating, which will cause quality problems of the film material, such as loose surface, etc.

In addition, the coating of materials such as pipes often has long workpieces, and ordinary equipment cannot complete the coating of long workpieces; the flat target is used to complete the coating of long pipes, either because the target size is large and the cost is high, or the coating time is long and the efficiency is low. also low

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