Strontium ruthenate/lanthanum strontium manganese oxygen transition metal oxide heterojunction and preparation method thereof
A lanthanum strontium manganese oxide and transition metal technology, which is applied in the data storage field of functional oxide thin film materials, can solve the problems of uncontrollable size and direction of exchange bias, and achieve precise controllable size and direction of exchange bias, and a preparation process. Simple, low production cost effect
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[0045] Example 1
[0046] The preparation steps of any SRO / LSMO-0 (SRO / LMO) transition metal oxide heterojunction thin film material are:
[0047] (1) Prepare pure phase SRO and LSMO-0 targets (that is, LMO targets) by the aforementioned solid-state sintering method, and place each target in the deposition chamber of the pulsed laser deposition equipment for use;
[0048] (2) SrTiO 3 (001) The single crystal substrate was ultrasonically cleaned in acetone and alcohol solution for 20 min each, and the SrTiO 3 (001) The single crystal substrate is heated to 750°C under vacuum and kept for 30 min;
[0049] (3) Using pulsed laser deposition method under the conditions of substrate temperature and oxygen pressure of 750℃ and 40 Pa, respectively, adjust the distance between target and substrate to 4.5 cm, and use energy density to 1.5J / cm 2 The pulsed laser first bombards the SRO target, and the SrTiO 3 (001) A single-layer SRO film with a thickness of 15 nm is prepared on a single crystal s...
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[0052] Example 2
[0053] The preparation steps of any SRO / LSMO-0.1 transition metal oxide heterojunction thin film material according to the operating method of Example 1 are:
[0054] (1) Prepare SRO and LSMO-0.1 targets by the aforementioned solid-state sintering method, and place each target in the deposition chamber of the pulsed laser deposition equipment for use;
[0055] (2) SrTiO 3 (001) Single crystal substrates were ultrasonically cleaned in acetone and alcohol solution for 20 min each, SrTiO before deposition 3 (001) The single crystal substrate is heated to 750°C under vacuum and kept for 30 min;
[0056] (3) Using pulsed laser deposition method under the conditions of substrate temperature and oxygen pressure of 750℃ and 40 Pa, respectively, adjust the distance between target and substrate to 4.5 cm, and use energy density to 1.5J / cm 2 The pulsed laser first bombards the SRO target, and the SrTiO 3 (001) A single-layer SRO film with a thickness of 15 nm is prepared on a s...
Example Embodiment
[0059] Example 3
[0060] The preparation steps of any SRO / LSMO-0.2 transition metal oxide heterojunction thin film material according to the operating method of Example 1 are:
[0061] (1) Prepare SRO and LSMO-0.2 targets using the aforementioned solid-state sintering method, and place each target in the deposition chamber of the pulsed laser deposition equipment for use;
[0062] (2) SrTiO 3 (001) Single crystal substrates were ultrasonically cleaned in acetone and alcohol solution for 20 min each, SrTiO before deposition 3 (001) The single crystal substrate is heated to 750°C under vacuum and kept for 30 min;
[0063] (3) Using pulsed laser deposition method under the conditions of substrate temperature and oxygen pressure of 750℃ and 40 Pa, respectively, adjust the distance between target and substrate to 4.5 cm, and use energy density to 1.5J / cm 2 The pulsed laser first bombards the SRO target, and the SrTiO 3 (001) A single-layer SRO film with a thickness of 15 nm is prepared on ...
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