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A kind of preparation method of ultra-thin carbon film

A carbon film and ultra-thin technology, applied in the field of preparation of ultra-thin carbon films, can solve problems such as inapplicability of ultra-thin two-dimensional nanomaterials, and achieve the effects of automatic processing means, simple and efficient preparation methods, and promotion of carbonization.

Active Publication Date: 2020-09-22
SUZHOU UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The existing laser direct writing carbonized polymer method is not suitable for the preparation of ultra-thin two-dimensional nanomaterials

Method used

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  • A kind of preparation method of ultra-thin carbon film
  • A kind of preparation method of ultra-thin carbon film
  • A kind of preparation method of ultra-thin carbon film

Examples

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Embodiment 1

[0046] This embodiment provides a kind of preparation method of ultra-thin carbon film, and its preparation process is as follows figure 1 As shown, the specific operation steps are as follows:

[0047] With quartz as the first matrix material, after the surface is cleaned and dried, plasma treatment is carried out in oxygen for 1 minute to obtain a plasma-treated quartz sheet ( figure 1 a).

[0048]Select polyamic acid solution (PAA), a carbonizable polymer prepolymer, as the carbonization precursor material, dilute the PAA mother liquor to 1wt%, and take an appropriate amount on a quartz plate for high-speed spin coating. The spin coating procedure is as follows: (1) Rotational speed 1000rpm / min, spin coating for 30s, acceleration 500rpm / sec; (2) rotation speed 2000rpm / min, spin coating 30s, acceleration 1000rpm / sec; (3) rotation speed 5000rpm / min, spin coating 30s, acceleration 2000rpm / sec. After spin coating, transfer to an oven for heat treatment as follows: (1) 100°C ...

Embodiment 2

[0052] This embodiment provides a kind of preparation method of ultra-thin carbon film, and its preparation process is as follows figure 1 As shown, the specific operation steps are as follows:

[0053] Quartz is used as the first base material, and after the surface is cleaned and dried, plasma treatment is performed in oxygen for 1 minute to obtain a plasma-treated quartz sheet.

[0054] Select polyamic acid solution (PAA), a carbonizable polymer prepolymer, as the carbonization precursor material, dilute the PAA mother liquor to 7wt%, and take an appropriate amount on a quartz plate for high-speed spin coating. The spin coating procedure is as follows: (1) Rotating speed 1000rpm / min, spin coating for 30s, acceleration 500rpm / sec; (2) rotation speed 2000rpm / min, spin coating 30s, acceleration 1000rpm / sec; (3) rotation speed 5000rpm / min, spin coating 30s, acceleration 2000rpm / sec. After spin coating, transfer to an oven for heat treatment as follows: (1) 100°C for water rem...

Embodiment 3

[0060] This embodiment provides a kind of preparation method of ultra-thin carbon film, and its preparation process is as follows figure 2 As shown, quartz is used as the first substrate material; a PDMS disk stamp is used as the second substrate, which is pre-patterned. The specific operation steps are as follows:

[0061] After cleaning and drying the surface of the PDMS stamp, carry out plasma treatment in oxygen for 1 minute, select carbonizable polymer prepolymer polyamic acid solution (PAA) as the carbonization precursor material, dilute the PAA mother liquor to 6wt%, take an appropriate amount of PAA solution in High-speed spin-coating is carried out on the PDMS stamp, and the spin-coating procedure is as follows: (1) 1000rpm / min, spin-coating 30s, acceleration 500rpm / sec; (2) 2000rpm / min, spin-coating 30s, acceleration 1000rpm / sec; (3) The rotating speed is 5000rpm / min, the spin coating is 30s, and the acceleration is 2000rpm / sec. The spin-coated pattern was a circu...

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Abstract

The invention relates to an ultrathin carbon membrane preparation method which comprises the following steps: forming a carbonization precursor layer on the surface of a first substrate, and carryingout in-situ carbonization on at least a part of the carbonization precursor layer by using a laser writing technique to obtain a dense ultrathin carbon membrane, wherein the first substrate has a thermal expansion coefficient of minus 5*10<6>-60*10<6> / K, the first substrate has a laser absorption coefficient of 0.01-3, and materials of the carbonization precursor layer at least comprise carbonizeable macromolecules; the thickness of the carbonization precursor layer is 10-2000nm; the thickness of the ultrathin carbon membrane is 3-600nm. The method provided by the invention is rapid and efficient, low in cost and feasible in large-scale production, sizes and patterns of the carbon membrane can be automatically controlled, and the carbon membrane has an ultrathin thickness.

Description

technical field [0001] The invention relates to the technical field of 2D material preparation and the field of sensing, in particular to a preparation method of an ultra-thin carbon film. Background technique [0002] Ultrathin 2D nanomaterials such as graphene, hexagonal boron nitride (h-BN), transition metal dichalcogenides (TMDs, such as MoS2), graphitic carbonitrides (g-C 3 N 4 ), layered metal oxides and layered double hydroxides (LDHs), etc. have many excellent properties and performances, and have a wide range of applications in the fields of electronics, catalysis, and sensing. Researchers have developed a large number of synthetic methods for preparing these ultrathin 2D nanomaterials, such as mechanical cleavage, liquid exfoliation, ion intercalation and exfoliation, anion exchange and exfoliation, chemical vapor deposition (CVD), wet chemical synthesis, etc. Laser carbonization technology has the advantages of no solvent formula, automatic control of pattern si...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B32/05
CPCC01B32/05
Inventor 刘涛罗姜姜姚艳波阮晓军
Owner SUZHOU UNIV
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