A magnetic circuit structure of a sputtering ion pump and the sputtering ion pump

An ion pump and magnetic circuit technology, applied in the direction of ion diffusion discharge tube, particle separation tube, etc., can solve the problems of difficult to achieve ideal magnetic field conditions, lack of magnetic circuit optimization, and insufficient use of magnetic field, and achieve dense and uniform distribution of magnetic lines of force. , The effect of reducing the processing difficulty and the requirement of magnet size
CN109830422BActive Publication Date: 2020-05-19NORTHEASTERN UNIV LIAONING
4 Cites 0 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
NORTHEASTERN UNIV LIAONING
Publication Date
2020-05-19

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
  • Figure 3
    Figure 3
Patent Text Reader

Abstract

The invention relates to a sputtering ion pump magnetic circuit structure and a sputtering ion pump, which include an air extraction component, a pair of ladder-type magnetic yokes, a magnet and a lower magnetic yoke. The two ends of the lower magnetic yoke are respectively provided with The magnet has a ladder-type magnetic yoke fixed on the upper surface of the magnet, the ladder-type magnetic yoke is wider at the bottom and narrower at the top, the vertical surfaces of the pair of ladder-type magnetic yokes are arranged oppositely, and the air extraction assembly is fixed on Between the two ladder-type magnetic yokes, as the distance from the magnet increases, the thickness of the ladder-type magnetic yoke gradually decreases, shrinking the magnetic lines of force therein, so that a uniform magnetic field with constant magnetic induction intensity is formed in the space of the air extraction assembly. . In this magnetic circuit structure, the magnetic yoke bundles a large number of magnetic lines. The magnetic induction intensity at the axis of the anode cylinder in the air extraction assembly with the magnetic yoke is generally higher than that of the air extraction assembly without the magnetic yoke. The magnetic field utilization rate is high, the improvement effect is obvious, and the structure is simple. , effectively reducing the volume and weight of the pump and reducing processing costs.
Need to check novelty before this filing date? Find Prior Art

Description

technical field

[0001] The invention relates to a magnetic circuit structure of a sputtering ion pump and the sputtering ion pump, belonging to the technical field of vacuum pumps. Background technique

[0002] Sputtering ion pump is an ultra-high vacuum pump, mainly composed of four parts: anode, cathode, magnetic field and power supply. In the case of low pressure, a DC high voltage is applied between the cathode plate and the anode cylinder, and electrons are released from the cold cathode and move closer to the anode, resulting in field emission. Before the electrons enter the anode, they undergo spiral motion under the dual action of electric field and magnetic field, and oscillate between the cathode plates. During the oscillating process, they collide with gas molecules, ionize the gas, and generate positive ions and secondary electrons. And produce an avalanche phenomenon. The generated positive ions bombard the cathode titanium plate with negative potential, and s...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More