Gas arc discharge device, coupling system connected to vacuum cavity and ion nitriding process

Abstract

The invention provides a gas arc discharge device, a coupling system of a vacuum cavity and an ion nitriding process. A thermal cathode electron emission principle is utilized to coordinate with an auxiliary cathode to generate plasma, and the plasma nitriding is carried out through coupling of a magnetic field module of the device and a cavity axial magnetic field module. The parameters of the gas arc discharge device and the cavity axial magnetic field are controlled to be coupled, the optimal magnetic field parameters are selected, the plasma energy and density in the vacuum cavity are increased, and the optimal nitriding effect is obtained. According to the device and the method, 316L austenitic stainless steel is subjected to 60 min plasma nitriding treatment, the hardness of a nitriding layer can reach 1100 HV0.05, the nitriding depth can reach 50 micron, no nitride is precipitated in the nitriding layer, and the nitriding layer is a single gamma N phase, so that the high hardness and high wear resistance of a nitriding workpiece are ensured.

Description

technical field

[0001] The invention belongs to the technical field of metal material surface treatment, and in particular relates to a gas arc discharge device, a coupling system with a vacuum chamber and an ion nitriding process. Background technique

[0002] The use of the traditional ion nitriding process will produce N-containing gas or N that is harmful to the environment or personal safety. 2 with H 2 of mixed gas. In the traditional glow ion nitriding technology, some use pure nitrogen as the working gas, but the nitriding efficiency of the traditional glow nitriding process is generally very low, and the thickness of the obtained nitrided layer is relatively thin; and with the nitriding time The increase of the increase will form a layer of nitride precipitation layer on the surface of the workpiece, which will affect the mechanical properties or corrosion resistance of the material itself; in the traditional glow ion nitriding, the workpiece exists as a discharge...

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