Composite vacuum deposition method of combination magnetic field, lining special-shaped tube and porous baffle
A porous baffle and vacuum deposition technology, which is applied in vacuum evaporation plating, ion implantation plating, coating, etc., can solve the problems of film composition pollution, large particle defects, and low film deposition efficiency, so as to ensure uniformity, The effect of improving utilization efficiency
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specific Embodiment approach 1
[0025] Specific embodiment one: the following combination Figure 1-4 This embodiment will be described. In this embodiment, a vacuum deposition method in which a combined magnetic field and a lined special-shaped tube and a porous baffle are combined includes a bias power supply (1), an arc power supply (2), and an arc ion plating target source (3). ), high-power pulsed magnetron sputtering power supply (4), high-power pulsed magnetron sputtering target source (5), bias power supply waveform oscilloscope (6), high-power pulsed magnetron sputtering power supply waveform oscilloscope (7), Waveform synchronization matching device (8), movable coil device (9), movable coil device power supply (10), varistor device (11), multi-stage magnetic field device (12), multi-stage magnetic field device power supply (13), lining bias a conical tube, a stepped tube and a porous baffle assembly (14), a lining bias power supply (15), a sample stage (16) and a vacuum chamber (17);
[0026] In ...
specific Embodiment approach 2
[0044] Specific embodiment 2: The difference between this embodiment and the first embodiment is that a combined magnetic field and a vacuum deposition method of lining a special-shaped tube and a porous baffle are connected, and the arc power supply (2) is turned on, and the multi-stage magnetic field power supply is turned on. (5) Adjust the multi-stage magnetic field device (12), turn on the lining bias power supply (15), adjust the bias voltage of the lining bias conical tube, the stepped tube and the porous baffle assembly (14), and turn on the power supply of the movable coil device (10) Adjust the movable coil device (9), adjust the output resistance of the varistor device (10), and control the bias power supply (1) and the high-power pulse magnetron sputtering power supply (4) by the waveform synchronization matching device (8) to be turned on at the same time. , the period of the output pulse of the high-power pulsed magnetron sputtering power supply (4) is an integer ...
specific Embodiment approach 3
[0045] Embodiment 3: The difference between this embodiment and Embodiment 1 is that a combined magnetic field and a vacuum deposition method of lining a special-shaped tube and a porous baffle are connected, the arc power source (2) is turned on, and the multi-stage magnetic field power source is turned on. (5) Adjust the multi-stage magnetic field device (12), turn on the lining bias power supply (15), adjust the bias voltage of the lining bias conical tube, the stepped tube and the porous baffle assembly (14), and turn on the power supply of the movable coil device (10) Adjust the movable coil device (9), adjust the output resistance of the varistor device (10), and control the bias power supply (1) and the high-power pulse magnetron sputtering power supply (4) by the waveform synchronization matching device (8) to be turned on at the same time. , the high-power pulsed magnetron sputtering power supply (4) outputs high-power pulses and the phase of the bias pulse waveform ou...
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