CrAlN nano gradient coating with high hardness and high bonding force and preparing technology of CrAlN nano gradient coating

A gradient coating and preparation process technology, applied in metal material coating technology, coating, nanotechnology, etc., can solve the problem of reducing the bonding force between the coating and the substrate, reducing the bonding force between the coating and the substrate, and increasing the coating The risk of delamination and other problems can be achieved, and the effects of high bonding force, high high temperature thermal stability and corrosion resistance, high hardness and toughness can be achieved

Active Publication Date: 2019-07-12
TIANJIN UNIV OF TECH & EDUCATION TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the solid solution of Al element in the CrN phase will cause lattice distortion, generate greater stress in the coating, and reduce the bonding force between the coating and the substrate.
The reduction of the bonding force between the coating and the substrate will increase the risk of the coating peeling off during the cutting process, making the coating lose its effect and even reducing the service life of the tool

Method used

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  • CrAlN nano gradient coating with high hardness and high bonding force and preparing technology of CrAlN nano gradient coating
  • CrAlN nano gradient coating with high hardness and high bonding force and preparing technology of CrAlN nano gradient coating
  • CrAlN nano gradient coating with high hardness and high bonding force and preparing technology of CrAlN nano gradient coating

Examples

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Embodiment 1

[0033] In this embodiment, a CrAlN nanometer gradient coating with continuously changing composition is deposited on a single-side polished Si wafer. The substrate was ultrasonically cleaned in acetone, alcohol and distilled water for 20 min, and then cleaned with high-purity N 2 Blow dry, place on the sample rack in the coating machine, the revolution speed of the turntable is selected as 40r / min, and the target base distance is 100mm. The targets are made of pure metal Cr and Al (99.99wt.% pure), and the working gas and reaction gas are made of high-purity Ar and N respectively. 2 (Purities are both 99.999%).

[0034] First, the background vacuum of the vacuum chamber is evacuated to 1.0×10 -3 Below Pa; turn on the heating system, raise the temperature to 400°C, and continue to evacuate until the pressure of the vacuum chamber reaches 9.0×10 -3 When Pa is lower than Pa, 200 sccm of Ar gas is introduced until the pressure in the coating chamber reaches 1.5 Pa, a negative b...

Embodiment 2

[0038] In this embodiment, a CrAlN nanometer gradient coating is deposited on a polished cemented carbide substrate YG8. The substrate was ultrasonically cleaned in acetone, alcohol and distilled water for 20 min, and then cleaned with high-purity N 2 Dry it, and then place it on the sample rack facing the target in the coating machine. The rotating speed of the turntable is selected as 40r / min, and the distance between the target and the base is 100mm. The targets are made of pure metal Cr and Al (both with a purity of wt.99.9%), and the working gas and reaction gas are made of Ar and N respectively. 2 (Purities are both 99.999%).

[0039] First, the background vacuum of the vacuum chamber is evacuated to 1.0×10 -3 Below Pa; turn on the heating system, raise the temperature to 400°C, and continue to evacuate until the pressure of the vacuum chamber reaches 9.0×10 -3 When Pa is lower than Pa, 200 sccm of Ar gas is introduced until the pressure in the coating chamber reaches...

Embodiment 3

[0043] In this embodiment, a CrAlN nanometer gradient coating is deposited on a YT15 cemented carbide indexable turning insert. The substrate was ultrasonically cleaned in acetone, alcohol and distilled water for 20 min, and then cleaned with high-purity N 2 Dry it, and then place it on the sample rack facing the target in the coating machine. The rotating speed of the turntable is selected as 40r / min, and the distance between the target and the base is 100mm. The targets are made of pure metal Cr and Al (both with a purity of wt.99.9%), and the working gas and reaction gas are made of Ar and N respectively. 2 (Purities are both 99.999%).

[0044] First, the background vacuum of the vacuum chamber is evacuated to 1.0×10 -3 Below Pa; turn on the heating system, raise the temperature to 400°C, and continue to evacuate until the pressure of the vacuum chamber reaches 9.0×10 -3 When Pa is lower than Pa, 200 sccm of Ar gas is introduced until the pressure in the coating chamber ...

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Abstract

The invention discloses a CrAlN nano gradient coating with high hardness and high bonding force and a preparing technology of the CrAlN nano gradient coating, and belongs to the technical field of coating preparing. The arc ion plating and magnetron sputtering composite plating technology is adopted to prepare the CrAlN nano gradient coating on a base material, inflation of Ar gas is conducted before coating, the bias voltage of -600-1,000 V is adopted, glowing cleaning is conducted on a base body for 10-30 min, then, a Cr target is started, the bias voltage is gradually reduced to range from-20 V to -100 V, and deposition of a metal Cr transition layer is conducted for 5-20 min; inflation of N2 is conducted, and deposition of a CrN layer is kept for 5-40 min; and an Al target is started,the power of the Al target is linearly increased, and the CrAlN nano gradient coating with components continuously changing is deposited. The related CrAlN nano gradient coating is dense in structure, high in hardness and high in bonding force with the base body, the preparing technology is simple, repeatability is good, and industrial production is easy.

Description

technical field [0001] The invention relates to the technical field of coating preparation, in particular to a CrAlN nano-gradient coating with high hardness and high binding force and a preparation process thereof. Background technique [0002] New technologies such as high-speed hard cutting, high-speed high-precision cutting and green dry cutting are constantly emerging, and the cutting temperature is often as high as 1000°C, which puts forward higher requirements for the red hardness and high-temperature thermal stability of the tool coating. CrN coating has good high temperature oxidation resistance, corrosion resistance and adhesive wear resistance, and is widely used in various cutting tools. Adding Al element to CrN, Al dissolves in the CrN lattice, plays the role of solid solution strengthening, and can greatly improve the hardness of the coating. At high temperature, the surface of CrAlN coating can form a continuous layer of Al 2 o 3 and Cr 2 o 3 Mixed oxide ...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/35C23C14/32C23C14/14B82Y40/00
CPCC23C14/0021C23C14/0084C23C14/0641C23C14/14C23C14/325C23C14/35
Inventor 范其香王欣梁杨梦甜王铁钢
Owner TIANJIN UNIV OF TECH & EDUCATION TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE
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