Conductive diamond particles, conductive diamond electrode, and testing device
A technology of conductive diamond and diamond film, applied in the direction of diamond, measuring devices, electrodes, etc., can solve the problems of difficult expansion of equipment, difficulty in obtaining diamond electrodes, hard diamond film, etc., and achieve high crystallization quality, chemical stability and detection sensitivity excellent effect
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Embodiment 1
[0093]
[0094] In the following examples, a microwave plasma CVD apparatus 21 (MPCVD apparatus, available from ASTexMicrowave Systems) was used as a unit configured to form a boron-doped diamond film (BDD film) on a granular substrate. Figure 4 The MPCVD apparatus 21 is schematically illustrated.
[0095] As granular substrate 2, pulverized synthetic diamond powder (DP, available from Element Six, Micron+MDA, manufacturer with a nominal particle size of 3 to 6 microns) was used.
[0096] Diamond powder contains metal components and various sp 2 carbon. These impurities can adversely affect the final product. Therefore, in order to remove these impurities, the diamond powder was treated with aqua regia heated to 60 degrees Celsius for 30 minutes, and similarly treated with 30% hydrogen peroxide water heated to 60 degrees Celsius for 30 minutes to remove impurities contained in the diamond powder . The washed diamond powder was ultrasonically washed in ultrapure water / 2-...
Embodiment 2
[0118]Except that the growth time of the boron-doped diamond film by the MPCVD device is different from the preparation of the conductive diamond particles in Example 1 in 4 hours, the conductive diamond particles are prepared in the same manner as in Example 1, and the same method as in Example 1 evaluated in the same manner.
Embodiment 3
[0120] Except that the growth time of the boron-doped diamond film by the MPCVD device is 12 hours different from the preparation of the conductive diamond particles in Example 1, the conductive diamond particles are prepared in the same manner as in Example 1, and the same method as in Example 1 evaluated in the same manner.
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