Infrared stealth metal nanoparticle metamaterial composite film compatible with visible light stealth and preparation method thereof

A technology of metal nanoparticles and composite films, applied in metal material coating technology, optics, optical components, etc., can solve the problems of low emissivity, unfavorable visible light stealth compatibility, etc., and achieve good quality, good controllability of film growth, good repeatability

Inactive Publication Date: 2019-09-03
NORTHEASTERN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Among them, metal Al is widely used because of its low emissivity and cheapness, but the high gloss of its surface makes it highly reflective to visible light, which is not conducive to the compatibility of visible light stealth, which makes cheap Metal Al has certain limitations in the application of infrared stealth

Method used

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  • Infrared stealth metal nanoparticle metamaterial composite film compatible with visible light stealth and preparation method thereof
  • Infrared stealth metal nanoparticle metamaterial composite film compatible with visible light stealth and preparation method thereof
  • Infrared stealth metal nanoparticle metamaterial composite film compatible with visible light stealth and preparation method thereof

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Experimental program
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Effect test

Embodiment 1

[0028] Metal Al is sputtered by DC power, and SiO is sputtered by RF power 2 , Al-SiO 2 The preparation method of the nanoparticle supermaterial composite film comprises the following steps:

[0029] Step 1, substrate selection and pretreatment:

[0030] Select a polished silicon wafer with a surface roughness of less than 0.5nm and a crystal orientation of (100), ultrasonically clean the silicon wafer in acetone, deionized water, and alcohol solution for 15 minutes, and dry it with a high-purity argon high-pressure spray gun;

[0031] Step 2, target preparation:

[0032] The purity of the metal Al target used is ≥99.99%, and the SiO used 2 Target purity ≥ 99.999%, put the two targets into two target positions respectively, and close the target baffle;

[0033] Step 3, composite membrane preparation:

[0034] Place the substrate processed in step 1 on the sample stage. When the vacuum degree of the coating chamber is better than 3.2×10 -3 When Pa, enter Ar gas, the pres...

Embodiment 2

[0039] Metal Ti is sputtered by DC power and SiO is sputtered by RF power 2 , Ti-SiO 2 The preparation method of the nanoparticle supermaterial composite film comprises the following steps:

[0040] Step 1, substrate selection and pretreatment:

[0041] Select a polished silicon wafer with a surface roughness of less than 0.5nm and a crystal orientation of (100), ultrasonically clean the silicon wafer in acetone, deionized water, and alcohol solution for 15 minutes, and dry it with a high-purity argon high-pressure spray gun;

[0042] Step 2, target preparation:

[0043] The purity of the metal Ti target used is ≥99.99%, and the SiO used 2 Target purity ≥ 99.999%, put the two targets into two target positions respectively, and close the target baffle;

[0044] Step 3, composite membrane preparation:

[0045] Place the substrate processed in step 1 on the sample stage. When the vacuum degree of the coating chamber is better than 3.2×10 -3 When Pa, enter Ar gas, the press...

Embodiment 3

[0048] Alloy TiAl is sputtered by DC power, and SiO is sputtered by RF power 2 , TiAl-SiO 2 The preparation method of the nanoparticle supermaterial composite film comprises the following steps:

[0049] Step 1, substrate selection and pretreatment:

[0050] Select a polished silicon wafer with a surface roughness of less than 0.5nm and a crystal orientation of (100), ultrasonically clean the silicon wafer in acetone, deionized water, and alcohol solution for 15 minutes, and dry it with a high-purity argon high-pressure spray gun;

[0051] Step 2, target preparation:

[0052] The purity of the metal TiAl target used is ≥99.99%, and the SiO used 2 Target purity ≥ 99.999%, put the two targets into two target positions respectively, and close the target baffle;

[0053] Step 3, composite membrane preparation:

[0054] Place the substrate processed in step 1 on the sample stage. When the vacuum degree of the coating chamber is better than 3.2×10 -3 When Pa, enter Ar gas, th...

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Abstract

The invention relates to an infrared stealth metal nanoparticle metamaterial composite film compatible with visible light stealth and a preparation method thereof and belongs to the technical field ofinfrared stealth of thin film materials. For the composite film, metal nanoparticles with the size of 5 nm -20 nm are uniformly arranged in an oxide substrate, the size of the metal nanoparticles isuniform, the size change is 1%-5%, and the thickness of the composite film is 20 nm -200 nm. The metal is Al, Ti, Au, Ag, Cu and other metals and an alloy composed of the metals, and the oxide is SiO2, SiO, Al3O2, TiO2 and other non-metal oxides. According to the metal nanoparticle metamaterial composite film prepared by the invention, the size of the metal nanoparticles can be controlled, the gapis adjustable, the arrangement is uniform, and the like; when the thickness is only 200 nm, the reflectivity of the infrared band is up to 99%, and the reflectivity of the visible wave band is as lowas 30%, thereby realizing compatibility of visible light stealth with infrared stealth.

Description

technical field [0001] The invention belongs to the technical field of infrared stealth of thin film materials, and in particular relates to an infrared stealth metal nanoparticle supermaterial composite film compatible with visible light stealth and a preparation method thereof. Background technique [0002] For all objects in nature, as long as its temperature is higher than absolute zero (0K), the object will always convert thermal energy into radiation energy, thereby emitting thermal radiation. Most infrared detection technologies rely on the difference in infrared radiation between the target and the background to detect the target, especially at night, the target object tends to show higher brightness on infrared thermal imaging, thus forming a sharp contrast with the background. It is based on the above theories that infrared imaging detection technology is more and more widely used in high-tech warfare. For example, the well-known infrared thermal imaging camera use...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B1/00G02B5/08C23C14/34C23C14/06
CPCC23C14/0688C23C14/3464G02B1/002G02B5/0808
Inventor 李国建刘晓明任志宇刘诗莹王强
Owner NORTHEASTERN UNIV
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