Agent for removing halogen gas, method for producing same, method for removing halogen gas with use of same, and system for removing halogen gas

一种卤素气体、制造方法的技术，应用在分离方法、气体处理、化学仪器和方法等方向，能够解决未能满足等问题，达到降低管柱更换频率、高速处理速度、防止漏出的效果

Active Publication Date: 2019-09-20
CLARIANT CATALYSTS JAPAN
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] As described above, although the removal technology of halogen-based gases has been advanced, the actual situation is that there are market needs for a removal agent with higher speed and higher performance, and the current situation cannot meet the above-mentioned requirements.

Method used

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  • Agent for removing halogen gas, method for producing same, method for removing halogen gas with use of same, and system for removing halogen gas
  • Agent for removing halogen gas, method for producing same, method for removing halogen gas with use of same, and system for removing halogen gas
  • Agent for removing halogen gas, method for producing same, method for removing halogen gas with use of same, and system for removing halogen gas

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0125] Remover samples were prepared as follows. The pseudo-boehmite powder and the sodium thiosulfate pentahydrate powder were measured so that the pseudo-boehmite was 90% by weight and the sodium thiosulfate pentahydrate was 10% by weight. ) model 18) was mixed while adding water to obtain a kneaded cake (cake). Using a disk granulator (Fuji Paudal Co., Ltd., model F-5), the kneaded cake was made into a granular molded body with a diameter of about 2 mm and a length of about 6 mm. The obtained molded body was dried overnight in an electric dryer kept at 50° C., then placed in a desiccator for more than 1 hour, and cooled to room temperature to obtain a remover sample of Example 1. Table 1 shows the values ​​of sulfur atom content, tap density, and chlorine removal ability.

Embodiment 2

[0127] The removal agent sample of Example 2 with 82% by weight of pseudo-boehmite and 18% by weight of sodium thiosulfate pentahydrate was prepared by the same method and conditions as in Example 1. Table 1 shows the values ​​of sulfur atom content, tap density, and chlorine removal ability.

Embodiment 3

[0129] The removal agent sample of Example 3, which contained 75% by weight of pseudo-boehmite and 25% by weight of sodium thiosulfate pentahydrate, was prepared by the same method and conditions as in Example 1. Table 1 shows the values ​​of sulfur atom content, tap density, and chlorine removal ability.

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PUM

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Abstract

Provided are: an agent for removing a halogen gas such as chlorine in a waste gas by means of reduction; a method for producing this agent; a method for removing a halogen gas with use of this agent; and a system for removing a halogen gas. An agent for removing a halogen gas, which contains at least pseudo-boehmite that serves as a host material and a sulfur-containing reducing agent that serves as a guest material. It is preferable that 1-8% by weight of the reducing agent in terms of elemental sulfur is contained based on the total amount of the pseudo-boehmite and the sulfur-containing reducing agent. It is also preferable that at least one inorganic compound selected from among oxides, carbonate salts and hydrocarbon salts of alkaline earth metal elements, transition metal elements and zinc group elements is additionally contained as a third component.

Description

technical field [0001] The present invention relates to a remover for efficiently reacting and immobilizing a halogen-based gas, especially a halogen-based exhaust gas used in etching gas or cleaning agent in the manufacture of semiconductors, etc., with a solid oxide , and the exhaust gas is separated again without causing environmental pollution. Background technique [0002] F in the halogen gas 2 , Cl 2 、Br 2 , ClF 3 , BrF 3 , BrF 5 , broadly including SiF 4 、BCl 3 A variety of halogenated non-metallic gases. Conventionally, as methods for removing halogen-based gases, there are wet removal methods in which a large amount of water is used to remove them in a scrubber, and dry-type removal methods in which halogen-based gases are decomposed and immobilized in contact with solids. In terms of ease of operation, etc., the dry removal method is widely used. In such a case, there is a risk of leakage of exhaust gas due to a reduction in the removal ability of the re...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01J20/08B01D53/68B01D53/82B01D53/86B01J20/04B01J20/18B01J20/28B01J20/30
CPCB01J20/04B01J20/08B01J20/18B01J20/28B01J20/30B01J20/041B01J20/045B01J20/06B01J20/28071B01J20/28073B01J20/28083B01J20/28085B01J20/3007B01J20/3014B01D2257/2047B01D53/685B01D2257/302B01D2258/0216B01D2257/2042B01D2257/55B01D2257/2045B01D2257/204B01D2257/2027B01D2257/2022B01D2257/2025B01D2253/104B01D2253/102B01D53/508B01D2251/304B01D2251/404B01D2251/602B01D2251/604B01D2251/606B01D2253/108B01D2253/308B01D2253/311B01D2251/402B01D2255/20792B01D2251/608B01D53/02B01D53/82B01D53/86B01D53/68B01D2253/1128B01D2251/20B01D2253/1124
Inventor 中嶋直仁砂田健一朗塩谷靖金贤中
Owner CLARIANT CATALYSTS JAPAN
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