A self-assembly preparation method of a micro-nano multi-level column structure
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- BEIHANG UNIV
- Publication Date
- 2022-06-17
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Abstract
Description
technical field
[0001] The invention relates to the technical field of micro-nano material preparation, in particular to a self-assembly preparation method of a micro-nano multi-level column structure. Background technique
[0002] In recent years, polymer structures have shown wide application prospects in the fields of organic semiconductor devices, biosensors, and biomimetic adhesive functional surfaces. Therefore, how to construct polymer structures has become a research hotspot.
[0003] Some researchers use traditional lithography technology to achieve higher resolution nanolithography by continuously shortening the exposure wavelength, but the processing cost is very high; there are also scanning processing through electron beam and focused ion beam technology, which is costly And the efficiency is low; some researchers use nanoimprint technology to prepare nanostructures, but due to the limitation of demolding factors, it is difficult to obtain nanostructures with hi...