Si-APD photoelectric detector based on black silicon and quantum dots and preparation method of Si-APD photoelectric detector
A technology of photodetectors and quantum dots, which is applied in circuits, electrical components, semiconductor devices, etc., can solve the problems of small over-noise, inability to respond to near-infrared bands, and low near-infrared responsivity, achieving long response time and improving infrared Responsiveness, effect of improving absorption efficiency
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[0033] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the drawings in the embodiments of the present invention. Apparently, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention. Additionally, the protection scope of the present invention should not be limited only to the specific experimental methods or specific parameters described below.
[0034] The applicant is committed to the research of expanding the detection spectrum of Si, and has carried out long-term development and exploration based on black silicon and quantum dots. The present invention provides a Si-APD photodetector based on black silicon and quantum dots and its prep...
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