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Liquid detection chip system for optical phase differences based on VCSEL (vertical-cavity surface-emitting laser) coupling array

A technology of coupling array and detection chip, applied in the intersection of optoelectronic technology and sensing technology, can solve the problems of inability to real-time detection and complex structure, and achieve the effect of wide trace detection, small volume and good application prospect.

Active Publication Date: 2019-11-12
BEIJING UNIV OF TECH
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Problems solved by technology

[0004] The invention proposes a liquid detection chip system based on optical phase difference, which solves the problems of traditional liquid refractive index detection equipment, complex structure and incapable of real-time detection

Method used

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  • Liquid detection chip system for optical phase differences based on VCSEL (vertical-cavity surface-emitting laser) coupling array
  • Liquid detection chip system for optical phase differences based on VCSEL (vertical-cavity surface-emitting laser) coupling array
  • Liquid detection chip system for optical phase differences based on VCSEL (vertical-cavity surface-emitting laser) coupling array

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Embodiment 1

[0023] The present invention will be described in detail by taking the microfluidics integrated on the surface of the proton injection type VCSEL coupling array as an example.

[0024] Combine below Figure 3-Figure 7 The specific implementation of the preparation method of the liquid refractive index sensor chip integrated on the VCSEL coupling array and the microfluidic channel chip is introduced respectively;

[0025] Step 1. Using metal-organic chemical vapor deposition (MOCVD) to sequentially epitaxially grow thirty-four pairs of n-Al on N-GaAs (0.12-0.9) GaAs and n-Al 0.9 GaAs forms the DBR mirror, Al (0.12-0.9) GaAs / Al 0.9 GaAs lower confinement layer, three pairs of Al 0.3 GaAs / GaAs quantum well structure active region, Al 0.9 GaAs / Al (0.12-0.9) GaAs upper confinement layer, 22.5 to p-Al 0.12 GaAs and p-Al (0.9-0.12) GaAs forms the DBR mirror, p-Al 0.12 GaAs and p-GaAs heavily doped contact layers;

[0026] Step 2, using plasma-enhanced chemical vapor deposit...

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Abstract

The invention discloses a liquid detection chip system for optical phase differences based on a VCSEL (vertical-cavity surface-emitting laser) coupling array and belongs to the technical field of cross of semiconductor laser emitter techniques and biochemical detection techniques. By using techniques such as proton injection, cavity induction reverse waveguide or photonic crystals, preparation ofthe VCSEL coupling array can be achieved. By using processes such as PECVD (plasma enhanced chemical vapor deposition), photoetching, sputtering, reactive ion etching, wet etching and bonding, a microfluidic structure is integrated on the surface of the VCSEL coupling array. By using a microfluidic technique on the upper surface of the VCSEL coupling array, a liquid to be tested is introduced above VCSEL coupling array units, then light beam coupling phase differences of VCSEL units are changed, laser beams are derived, the refractive index of a liquid can be calculated by measuring deflectionangles of laser beams, and detection on liquid refractive indexes can be achieved.

Description

technical field [0001] The invention belongs to the intersecting field of optoelectronic technology and sensing technology, and in particular relates to the design and preparation of a liquid refractive index sensing chip based on a VCSEL coupling array. Background technique [0002] Vertical-cavity surface-emitting lasers (Vertical-cavity surface-emitting lasers, VCSELs) have the advantages of low threshold, circular spot, and planar process compatibility and easy integration. They have important applications in the fields of optical communication, optical interconnection, and sensing. One of the ideal light sources for chemical and biochemical detection systems (lab-on-a-chip). The VCSEL coupling array controls the laser beam by adjusting the phase difference between the array elements. When the phase of the laser array unit changes, its wavefront will change, thereby causing the laser beam to deflect in space. In the VCSEL array coupling, by changing the optical path dif...

Claims

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Application Information

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IPC IPC(8): B01L3/00G01N21/41H01S5/183
CPCB01L3/502707B01L2300/0809B01L2300/0887G01N21/41H01S5/183
Inventor 徐晨赵壮壮解意洋潘冠中胡良臣庞伟杨满坡
Owner BEIJING UNIV OF TECH
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