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A liquid detection chip based on optical phase difference of vcsel coupling array

A technology of coupling array and detection chip, which is applied in the intersection of optoelectronic technology and sensing technology, can solve the problems of inability to detect in real time and complex structure, and achieve the effect of wide trace detection, small volume, and trace detectable sample range.

Active Publication Date: 2021-06-25
BEIJING UNIV OF TECH
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  • Application Information

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Problems solved by technology

[0004] The invention proposes a liquid detection chip based on optical phase difference, which solves the problems of traditional liquid refractive index detection equipment, complex structure and incapable of real-time detection

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  • A liquid detection chip based on optical phase difference of vcsel coupling array
  • A liquid detection chip based on optical phase difference of vcsel coupling array
  • A liquid detection chip based on optical phase difference of vcsel coupling array

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Embodiment 1

[0023] The present invention will be described in detail by taking the microfluidics integrated on the surface of the proton injection type VCSEL coupling array as an example.

[0024] Combine below Figure 3-Figure 7 The specific implementation of the preparation method of the liquid refractive index sensor chip integrated on the VCSEL coupling array and the microfluidic channel chip is introduced respectively;

[0025] Step 1. Using metal-organic chemical vapor deposition (MOCVD) to sequentially epitaxially grow thirty-four pairs of n-Al on N-GaAs (0.12-0.9) GaAs and n-Al 0.9 GaAs forms the DBR mirror, Al (0.12-0.9) GaAs / Al 0.9 GaAs lower confinement layer, three pairs of Al 0.3 GaAs / GaAs quantum well structure active region, Al 0.9 GaAs / Al (0.12-0.9) GaAs upper confinement layer, 22.5 to p-Al 0.12 GaAs and p-Al (0.9-0.12) GaAs forms the DBR mirror, p-Al 0.12 GaAs and p-GaAs heavily doped contact layers;

[0026] Step 2, using plasma-enhanced chemical vapor deposit...

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Abstract

The invention relates to a liquid detection chip system based on the optical phase difference of a VCSEL coupling array, which belongs to the cross technical field of semiconductor laser technology and biochemical detection technology. The invention realizes the preparation of the VCSEL coupling array by adopting technologies such as proton injection or cavity induced anti-waveguide or photonic crystal. Microfluidic structures are integrated on the surface of VCSEL coupling arrays by PECVD, photolithography, sputtering, reactive ion etching, wet etching and bonding. Using microfluidic technology on the upper surface of the VCSEL coupling array, the liquid to be tested is passed into the top of the VCSEL coupling array unit, causing the beam coupling phase difference between the VCSEL units to change, causing the laser beam to deflect. By measuring the deflection angle of the laser beam, it can be calculated The refractive index of the liquid is detected to realize the detection of the liquid refractive index.

Description

technical field [0001] The invention belongs to the intersecting field of optoelectronic technology and sensing technology, and in particular relates to the design and preparation of a liquid refractive index sensing chip based on a VCSEL coupling array. Background technique [0002] Vertical-cavity surface-emitting lasers (Vertical-cavity surface-emitting lasers, VCSELs) have the advantages of low threshold, circular spot, and planar process compatibility and easy integration. They have important applications in the fields of optical communication, optical interconnection, and sensing. One of the ideal light sources for chemical and biochemical detection systems (lab-on-a-chip). The VCSEL coupling array controls the laser beam by adjusting the phase difference between the array elements. When the phase of the laser array unit changes, its wavefront will change, thereby causing the laser beam to deflect in space. In the VCSEL array coupling, by changing the optical path dif...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B01L3/00G01N21/41H01S5/183
CPCB01L3/502707B01L2300/0809B01L2300/0887G01N21/41H01S5/183
Inventor 徐晨赵壮壮解意洋潘冠中胡良臣庞伟杨满坡
Owner BEIJING UNIV OF TECH