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Method for manufacturing suspension infrared thermal pile on substrate

An infrared heat and substrate technology, which can be used in the manufacture of final products, the manufacture of microstructure devices, sustainable manufacturing/processing, etc. Backside etching, guaranteed mechanical strength, process conditions and steps compatible effects

Active Publication Date: 2019-12-17
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] In view of the above-mentioned shortcoming of prior art, the object of the present invention is to provide a kind of method that makes suspension infrared thermopile on substrate, is used to solve the problem that the suspension infrared thermopile that the method of prior art makes has complicated process, mechanical Problems such as low strength and large device size

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  • Method for manufacturing suspension infrared thermal pile on substrate
  • Method for manufacturing suspension infrared thermal pile on substrate
  • Method for manufacturing suspension infrared thermal pile on substrate

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Embodiment Construction

[0043] Embodiments of the present invention are described below through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation modes, and various modifications or changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of the present invention.

[0044] Please refer to attached picture. It should be noted that the diagrams provided in this embodiment are only schematically illustrating the basic idea of ​​the present invention, and only the components related to the present invention are shown in the diagrams rather than the number, shape and shape of the components in actual implementation. Dimensional drawing, the type, quantity and proportion of each component can be change...

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Abstract

The invention provides a method for manufacturing a suspension infrared thermal pile on a substrate. The method comprises the following steps: forming a lateral corrosion guide layer on the surface ofthe substrate; depositing a sacrificial layer; manufacturing a thermocouple layer and an absorption film layer; depositing a thermocouple protection layer, performing etching to form a corrosion hole, and removing the lateral corrosion guide layer, the longitudinal corrosion guide layer and the substrate through the corrosion hole to form a heat insulation cavity; removing the thermocouple protection layer, depositing a lead insulation layer, etching the lead insulation layer to form a contact hole, and then forming a metal lead; and removing the sacrificial layer and part of the lead insulating layer to obtain the suspended infrared thermal pile. According to the invention, a single-side processing technology is adopted, so that monolithic integration of the micro-sensor and an integrated circuit can be realized, and small-size, low-cost and large-batch production is facilitated. In addition, the sacrificial layer is utilized to enhance the structural strength and improve the production yield.

Description

technical field [0001] The invention belongs to the technical field of silicon micromechanical sensing, in particular to a method for manufacturing a suspended infrared heat pile on a substrate. Background technique [0002] With the rapid development of MEMS technology, infrared detectors based on MEMS micromachining technology have been widely used in thermopile infrared detectors due to their small size and low price. Now they are widely used in non-contact temperature measurement and gas sensing. , security, satellite attitude control, infrared imaging and other fields. Thermal pile infrared detectors have obvious advantages over other types of infrared detectors, for example, they can work at room temperature without refrigeration equipment; they have the characteristics of self-excitation to generate signals, without applying additional bias voltage / current, and avoid self- The heating effect ensures low power consumption: the direct measurement of static infrared sig...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81C1/00
CPCB81C1/00349B81C1/00373B81C1/0015Y02P70/50
Inventor 李昕欣周温涵倪藻
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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