Ultraviolet/infrared double-color detector based on boron nitride
A technology of two-color detectors and ultraviolet detectors, applied in the field of ultraviolet/infrared two-color detectors, can solve problems such as difficult to improve, highly toxic raw materials, poor infrared response, etc., and achieve the effect of simple preparation
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Embodiment 1
[0034] Such as figure 1 As shown, the ultraviolet / infrared dual-color detector based on boron nitride is composed of a substrate 3, an ultraviolet detector epitaxial layer 1 and an infrared detector epitaxial layer 2. The ultraviolet detector epitaxial layer 1 is in the shape of a cube, and the lower surface and the substrate 3 have the same upper surface size, fixed on the upper surface of the substrate 3 (substrate 3 is a sapphire substrate), the material of the ultraviolet detector epitaxial layer 1 is three-dimensional boron nitride, and the thickness of the ultraviolet detector epitaxial layer 1 is 100 Nano. The infrared detector epitaxial layer 2 is also square, and the lower surface is the same size as the upper surface of the ultraviolet detector epitaxial layer 1. The lower surface of the infrared detector epitaxial layer 2 is fixed on the upper surface of the ultraviolet detector epitaxial layer 1. The material of the epitaxial layer 2 of the detector is two-dimensi...
Embodiment 2
[0036] Such as figure 2 As shown, the ultraviolet / infrared dual-color detector based on boron nitride is composed of a substrate 3 , an ultraviolet detector epitaxial layer 1 , an isolation layer 4 and an infrared detector epitaxial layer 2 . The ultraviolet detector epitaxial layer 1 is cube-shaped, and the lower surface is the same as the upper surface size of the substrate 3, and is fixed on the upper surface of the substrate 3 (the substrate 3 is a sapphire substrate), and the material of the ultraviolet detector epitaxial layer 1 is Three-dimensional boron nitride, the thickness of the epitaxial layer 1 of the ultraviolet detector is 100 nanometers. The isolation layer 4 is in the shape of a cube, and the lower surface is the same size as the upper surface of the ultraviolet detector epitaxial layer 1, the lower surface of the isolation layer 4 is fixed on the upper surface of the ultraviolet detector epitaxial layer 1, and the material of the isolation layer 4 is dielec...
Embodiment 3
[0038] Such as image 3 As shown, the ultraviolet / infrared dual-color detector based on boron nitride is composed of a substrate 3, an ultraviolet detector epitaxial layer 1 and an infrared detector epitaxial layer. The size of the upper surface is the same, fixed on the upper surface of the substrate 3 (substrate 3 is a sapphire substrate), the material of the ultraviolet detector epitaxial layer 1 is three-dimensional boron nitride, and the thickness of the ultraviolet detector epitaxial layer 1 is 200 nanometers . The infrared detector epitaxial layer is a patterned array structure, which is composed of a plurality of array units 2-1 arranged in an array. The shape of the array unit 2-1 is a cube, and the lower surface is fixed on the upper surface of the ultraviolet detector epitaxial layer 1. Above, the material of the array unit 2-1 is two-dimensional boron nitride, and the thickness of the infrared detector epitaxial layer 2 is 60 nanometers.
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