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Micro-miniature spectral absorption optical waveguide type mid-infrared gas sensor and application thereof

A gas sensor and spectral absorption technology, applied in instruments, scientific instruments, and material analysis through optical means, can solve the problems of increasing sensor volume and energy consumption, poor sensor stability, etc., and achieve increased contact area and high accuracy , the effect of high sensitivity

Active Publication Date: 2020-01-24
NINGBO UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, a flowmeter is generally used to maintain a certain pressure of the gas to be measured, but the change of the infrared absorption coefficient caused by the pressure change in the process cannot be avoided. Therefore, the stability of the sensor is poor, and these additional devices will also increase the volume and energy of the sensor. consumption

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  • Micro-miniature spectral absorption optical waveguide type mid-infrared gas sensor and application thereof
  • Micro-miniature spectral absorption optical waveguide type mid-infrared gas sensor and application thereof
  • Micro-miniature spectral absorption optical waveguide type mid-infrared gas sensor and application thereof

Examples

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specific Embodiment 1

[0038] A miniature spectral absorption optical waveguide mid-infrared gas sensor, such as figure 1 As shown, it includes a gas chamber 1. One side of the gas chamber 1 is provided with an air inlet hole 2 for introducing the sample gas to be tested and the other side is provided with an exhaust hole 3 for exporting the sample gas to be tested. There is an optical waveguide chip 7 for outputting gas light intensity signals and gas pressure signals, an incident optical fiber 4 for sending the light of the mid-infrared laser into the optical waveguide chip 7, and an optical signal for inputting the optical signal processed by the optical waveguide chip 7 into the spectrometer The first outgoing optical fiber 5 and the second outgoing optical fiber 6 for inputting the optical signal processed by the optical waveguide chip 7 into the photometer; figure 2 As shown, the optical waveguide chip 7 includes a chip substrate 11, and a Y-shaped branch optical waveguide 12 is arranged on t...

specific Embodiment 2

[0041] A method for detecting the concentration of a gas to be measured by a miniature spectral absorption optical waveguide mid-infrared gas sensor in the above specific embodiment 1 comprises the following steps:

[0042] (1) The gas to be measured is introduced into the gas chamber 1 through the air inlet hole 2, and the detection light emitted by the quantum cascade laser is introduced into the Y-shaped branch optical waveguide 12 through the incident optical fiber 4;

[0043] (2) After the detection light is split by the Y-shaped branch optical waveguide 12, part of the optical signal enters the micro-ring resonator 9, and the resonant light in the optical signal enters the micro-ring resonator 9 and is locked in the micro-ring resonator 9. The non-resonant light is directly output through the Y-shaped branch optical waveguide 12, and the output spectrum is the notch filter waveform at the resonance wavelength, which is transported to the spectrometer by the first outgoing...

specific Embodiment 3

[0046] Design this type of sensor according to the measurement of methane gas and conduct an example measurement

[0047] Since the characteristic absorption peak of methane gas is at a wavelength of 3.31um, it is necessary to optimize and design a suitable metal-assisted silicon groove waveguide 15 structure according to this wavelength, and set a suitable Ag layer 17 and Si 3 N 4 The thickness of the upper layer 18 is used to realize the maximum contact between the transmission mode field and the external gas at the characteristic wavelength. According to the calculation, the waveguide groove width at this time is 0.1um, the waveguide width is 1.1um (including the groove width), and the waveguide height is 0.5um. Si 3 N 4 The thickness of the upper layer 18 is 0.05um. Ag layer 17 has a thickness of 2um, Si 3 N 4 The lower layer 16 is 3um. like Figure 4 As shown, at this time, compared with the slot waveguide of the same size without adding silver, the transmission m...

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Abstract

The invention discloses a micro-miniature spectral absorption optical waveguide type mid-infrared gas sensor and an application thereof. The micro-miniature spectral absorption optical waveguide typemid-infrared gas sensor includes a gas chamber, a gas inlet hole and a gas outlet hole, and is characterized in that the gas chamber is provided with an optical waveguide chip for outputting a gas light intensity signal and a gas pressure signal, an incident optical fiber, a first outgoing optical fiber, and a second outgoing optical fiber; the optical waveguide chip includes a chip substrate; a Y-type branched optical waveguide is arranged on the chip substrate; the input end of the Y-type branched optical waveguide is coupled to the incident optical fiber; a micro-ring resonator is arrangedon one output waveguide of the Y-type branched optical waveguide; the output end of the corresponding output waveguide of the Y-type branched optical waveguide is coupled to the first outgoing opticalfiber; the output end of the other output waveguide of the Y-type branched optical waveguide is connected with a spiral waveguide; the output end of the spiral waveguide is coupled to the second outgoing optical fiber; and both the micro-ring resonator and the spiral waveguide use a metal-assisted silicon groove waveguide structure. The micro-miniature spectral absorption optical waveguide type mid-infrared gas sensor has the advantages of stable performance, high sensitivity, small size and easy integration.

Description

technical field [0001] The invention relates to a gas sensor tester, in particular to a miniature spectral absorption optical waveguide mid-infrared gas sensor and its application. Background technique [0002] With the development of industry, the application of gas sensors has become more and more important for environmental pollution and gas management in industrial production. Especially in recent years, natural gas, as a clean fossil energy, has been favored by many countries more and more. Therefore, in the process of methane transportation, use, and management, since methane is a flammable and explosive gas, it is very necessary to use methane sensors to detect it in real time. Traditional methane sensors mostly use a semiconductor resistive structure, which cannot prevent electromagnetic interference due to the existence of the power supply, and also has the problem of electric sparks caused by aging wires. If a relatively safe optical sensor is used, it will face ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/3504G01N21/01
CPCG01N21/3504G01N21/01
Inventor 张鑫李雪宾张晓伟郭冯金庆辉郑雁公
Owner NINGBO UNIV
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