Polydimethylsiloxane film, flexible capacitive sensor and preparation method thereof
A technology of polydimethylsiloxane and dimethylsiloxane, which is applied in the field of flexible sensors, can solve the problems of poor adaptability of traditional processes, difficulty in measuring small pressure, and inability to respond, achieving high sensitivity, Improvement of strength and measurement accuracy, effect of linearity improvement
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[0037] In order to improve the manufacturing success rate and quality of the sensor, a method for preparing a multi-high-sensitivity flexible capacitive sensor mainly includes a multi-layer stepped mesoporous microstructure process, an electrode process, a sacrificial layer process and a reactive ion etching process. Among them, the multi-layer stepped mesoporous microstructure process is used to prepare the intermediate dielectric layer, the electrode process is used to prepare the upper electrode layer and the lower electrode layer, the sacrificial layer process is used to release the sensor from the silicon wafer 1, and the reactive ion etching process Tested for bonding packages of top electrode layer, middle dielectric layer and bottom electrode layer. The multi-layer stepped mesoporous microstructure process uses a centrifugal method to prepare a multi-layer ordered microstructure with a pore size that increases layer by layer on the polydimethylsiloxane. The electrode t...
Embodiment 1
[0068] First, upper and lower electrodes are prepared, wherein steps (5) to (10) are photolithographic techniques.
[0069] (1) Clean the polished surface of the 2-inch silicon wafer 1 with acetone 11, isopropanol 12 and deionized water in sequence, and then dry it with nitrogen;
[0070] (2) Spin-coat 10% polyvinyl alcohol aqueous solution on the polished surface of the silicon wafer 1, the spin-coating speed is 500 rpm, and the spin-coating time is 60 seconds, and then place the silicon wafer 1 on the hot plate Heating, the heating temperature is 80°C, and the heating time is 15 minutes, the polyvinyl alcohol is cured to form a film, and the sacrificial layer 2 is formed;
[0071](3) Spin-coat polydimethylsiloxane on the silicon wafer 1 coated with the sacrificial layer at a spin-coating speed of 1000 rpm for 60 seconds, and then place the silicon wafer 1 on the hot plate Heating on top, the heating temperature is 90°C, and the heating time is 20 minutes, the polydimethylsi...
Embodiment 2
[0089] First, upper and lower electrodes are prepared, wherein steps (5) to (10) are photolithographic techniques.
[0090] (1) Clean the polished surface of the 2-inch silicon wafer 1 with acetone 11, isopropanol 12 and deionized water in sequence, and then dry it with nitrogen;
[0091] (2) Spin-coat 10% polyvinyl alcohol aqueous solution on the polished surface of the silicon wafer 1 at a spin-coating speed of 600 rpm for 50 seconds, then place the silicon wafer 1 on a hot plate Heating, the heating temperature is 80°C, and the heating time is 12 minutes, the polyvinyl alcohol is cured to form a film, and the sacrificial layer 2 is formed;
[0092] (3) Spin-coat polydimethylsiloxane on the silicon wafer 1 coated with the sacrificial layer at a spin-coating speed of 900 rpm for 70 seconds, and then place the silicon wafer 1 on the hot plate Heating on top, the heating temperature is 80°C, and the heating time is 25 minutes, the polydimethylsiloxane is cured to form a film, ...
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