Edge sensor for segmented mirror surface based on interference principle and working method thereof

Abstract

The invention discloses an edge sensor for a segmented mirror surface based on an interference principle, and a working method thereof. The edge sensor is characterized in that: an optical flat or spherical lens is placed on a sub-mirror splicing seam of a measured segmented mirror surface, the front surface of the optical flat or spherical lens is completely anti-reflection, and the rear surfaceof the optical flat or spherical lens is provided with a coating film; a parallel light source is arranged on the other side of a sub-mirror of the measured segmented mirror surface and the optical flat or spherical lens, light rays vertically enter the optical flat or spherical lens by means of a semi-reflecting and semi-transmitting prism and then part of the light beam on the surface returns, the other part is reflected by the surface of the sub-mirror along an original path, the two beams of reflected light form interference fringes, the interference fringes enter a microscopic amplification imaging system by means of the semi-reflecting and semi-transmitting prism, and target surface receiving and digital imaging are carried out by means of a CCD or CMOS detector, namely, the splicingerror of the adjacent sub-mirrors can be handled. The edge sensor prevents starlight and wavefront sensors from occupying and wasting a limited high-imaging-quality field of view of an optical system, is low in price, stable in performance and not affected by environmental factors, and is suitable for detecting the splicing errors between the adjacent sub-mirrors of various optical segmented mirror surfaces.

Description

technical field

[0001] The invention relates to a contact edge sensor for splicing mirrors based on the principle of interference, which is used in various splicing mirror optical systems, especially for splicing astronomical telescope mirror splicing error detection (including confocal and common phase splicing mirror active optics) system). The invention also relates to the working method of the edge sensor for splicing mirrors based on the principle of interference. Background technique

[0002] High-precision sensor technology is an inevitable choice for the high development of science and technology. There are many common sensors that can be used to detect the height of the mirror surface when splicing astronomical telescope mirrors, mainly divided into contact type and non-contact type, direct detection type and indirect detection type, etc.; contact type mainly includes capacitors installed on the back or side of the mirror surface , inductance, eddy current and oth...

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