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Hollow oblique metal microneedle array and manufacturing method thereof based on SU-8 mold

A technology of SU-8 and microneedle arrays, applied in the direction of microneedles, metal material coating technology, needles, etc., can solve the problems that the tip of the microneedle is difficult to achieve and the SU-8 mold is difficult to remove, and achieves easy removal and binding force Strong, adhesion-improving effect

Active Publication Date: 2020-02-14
NORTHWESTERN POLYTECHNICAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] For the above shortcomings or improvement needs of the prior art, the invention provides a method for manufacturing hollow metal microneedle arrays based on the SU-8 mold, which overcomes the difficulties of the SU-8 mold in the preparation of hollow metal microneedles by the current SU-8 mold. It has the advantages of good structural consistency, strong adhesion between the microneedle mold and the substrate, etc.

Method used

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  • Hollow oblique metal microneedle array and manufacturing method thereof based on SU-8 mold
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  • Hollow oblique metal microneedle array and manufacturing method thereof based on SU-8 mold

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Embodiment 1

[0052] Referring to Fig. 2, the hollow inclined metal microneedle array aimed at by this embodiment has a microneedle vertical height H of 500 μm; the outer diameter of the bottom of the microneedle is 150 μm; the microneedle inclination angle α is 70°; The wall thickness is 8 μm; the microneedle cone angle is 10°.

[0053] The preparation process of the hollow inclined metal microneedle array of this embodiment is as follows:

[0054] Step 1: Prepare the SU-8 mold on the glass substrate, including the following sub-steps:

[0055] 1.1 Preparation of SU-8 mold mask pattern on glass substrate

[0056] Clean the quartz glass sheet with a thickness of 500 μm by oxygen plasma; then sputter a layer of 60nm metal chromium on the surface of the quartz glass sheet; spin-coat positive resist on the chromium metal layer, expose the chromium to be corroded after exposure and development, and corrode the metal chromium. After in-liquid etching, the SU-8 mold mask pattern layer 4 is obta...

Embodiment 2

[0077] Referring to Fig. 2, the hollow inclined metal microneedle array aimed at by this embodiment has a microneedle vertical height H of 650 μm; the outer diameter of the bottom of the microneedle is 250 μm; the microneedle inclination angle α is 50°; The wall thickness is 10 μm; the microneedle cone angle is 15°.

[0078] The preparation process of the hollow inclined metal microneedle array of this embodiment is as follows:

[0079] Step 1: Prepare SU-8 mold on glass substrate

[0080] This step includes the following sub-steps:

[0081] 1.1 Preparation of SU-8 mold mask pattern on glass substrate

[0082] Clean the quartz glass sheet with a thickness of 1000 μm by oxygen plasma; then sputter a layer of 60nm metal chromium on the surface of the quartz glass sheet; spin-coat the positive resist on the chromium metal layer, expose the chromium to be corroded after exposure and development, and corrode the metal chromium. After in-liquid etching, the SU-8 mold mask pattern...

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Abstract

The invention discloses a hollow oblique metal microneedle array and a manufacturing method thereof based on an SU-8 mold, and belongs to the field of micro and nano-manufacturing processes. Accordingto the microneedle array, a metal material is platable metal; a hollow inclined metal microneedle is in an oblique cone shape with the oblique angle being 50 degrees to 70 degrees; the vertical height is 500mum to 650mum; the hollow oblique metal microneedle is of an iso-wall thickness structure from the bottom part to the tip end and has the wall thickness being 8mum to 10mum; the outer diameterof the bottom part of the hollow inclined metal microneedle is 150mum to 250mum; a cone angle of the hollow inclined metal microneedle is 10 degrees to 15 degrees; and the tip end is formed on the top part of the hollow inclined metal microneedle. According to the hollow oblique metal microneedle array and the manufacturing method thereof based on the SU-8 mold provided by the invention, an SU-8mold mask pattern is transferred onto a glass sheet, so that the problem that an air gap exists in traditional contact exposure is solved, the ultraviolet light intensity arriving at each layer of photoresist is improved, and the binding force of a microneedle mold and a base is higher. OmniCoat is fully used, so that the adhesivity of the SU-8 mold and the glass sheet is improved, and meanwhile,the SU-8 mold can be easily removed in the later period of the process. The oblique circular truncated cone microneedle is etched through RIE, so that the tip end is obtained, and the metal microneedle tip end structure is realized.

Description

technical field [0001] The invention belongs to the field of micro-nano manufacturing technology, and more specifically relates to a hollow inclined metal microneedle array and its manufacturing method based on SU-8 mould. Background technique [0002] Microneedle subcutaneous injection is an important development direction in the medical field. Micron-scale microneedles can greatly reduce injection pain and needle injection fear, and bring great convenience to slow injection and quantitative drug injection. Microneedles, typically 100 to 1000 μm in length, are able to penetrate the outer stratum corneum of the skin and inject therapeutic materials directly into the tissue layers. By controlling the length of the microneedles, the penetration depth can be ensured without affecting most nerve fibers and blood vessels located in the dermis. At present, microneedles mainly include solid microneedles, hollow microneedles, dissolvable microneedles, hydrogel microneedles, etc. T...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): A61M37/00C23C14/18C23C28/02C25D7/00
CPCA61M37/0015A61M2037/003A61M2037/0046A61M2037/0053C23C14/185C23C28/02C25D7/00
Inventor 马炳和张忠刚罗剑王善忠
Owner NORTHWESTERN POLYTECHNICAL UNIV
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